公开(公告)号：EP0780877A3

公开(公告)日：1999-02-10

申请号：EP96308758.0

申请日：1996-12-04

申请人： EATON CORPORATION

发明人： Blake, Julian Gaskill ,  Becker, Robert ,  Chipman, David ,  Jones, Mary ,  Menn, Lyudmila ,  Sinclair, Frank ,  Stone, Dale Keith

IPC分类号： H01J37/02 ,  H01J37/30 ,  H01J37/317

CPC分类号： H01J37/3002 ,  H01J37/3171 ,  H01J2237/022

摘要： A method of capturing and removing contaminant particles (14) moving within an evacuated interior region of an ion beam implanter (10) is disclosed. The steps of the method include: providing a particle collector (74) having a surface to which contaminant particles really adhere; securing the particle collector to the implanter such that particle adhering surface is in fluid communication to the contaminant particles moving within the interior region; and removing the particle collector from the implanter after a predetermined period of time. An ion implanter (10) in combination with a particle collector (74) for trapping and removing contaminant particles moving in an evacuated interior region of the implanter traversed by an ion beam is also disclosed, the particle collector including a surface to which the contaminant particles readily adhere and securement means ((76, 78) for releasably securing the particle collector to the implanter such that the particle adhering surface is in fluid communication with the evacuated interior region of the implanter.

公开(公告)号：EP0780877A2

公开(公告)日：1997-06-25

申请号：EP96308758.0

申请日：1996-12-04

申请人： EATON CORPORATION

发明人： Blake, Julian Gaskill ,  Becker, Robert ,  Chipman, David ,  Jones, Mary ,  Menn, Lyudmila ,  Sinclair, Frank ,  Stone, Dale Keith

IPC分类号： H01J37/02 ,  H01J37/30 ,  H01J37/317

CPC分类号： H01J37/3002 ,  H01J37/3171 ,  H01J2237/022

摘要： A method of capturing and removing contaminant particles (14) moving within an evacuated interior region of an ion beam implanter (10) is disclosed. The steps of the method include: providing a particle collector (74) having a surface to which contaminant particles really adhere; securing the particle collector to the implanter such that particle adhering surface is in fluid communication to the contaminant particles moving within the interior region; and removing the particle collector from the implanter after a predetermined period of time. An ion implanter (10) in combination with a particle collector (74) for trapping and removing contaminant particles moving in an evacuated interior region of the implanter traversed by an ion beam is also disclosed, the particle collector including a surface to which the contaminant particles readily adhere and securement means ((76, 78) for releasably securing the particle collector to the implanter such that the particle adhering surface is in fluid communication with the evacuated interior region of the implanter.

摘要翻译： 俘获和清除不纯粒子（14）在一个离子束注入机的抽真空的内部区域内移动的方法（10）游离缺失盘。 该方法的步骤包括：提供具有表面到哪个污染物颗粒附着真正的粒子收集器（74）; 固定所述粒子收集器的注入机的搜索没有坚持颗粒表面是在所述内部区域内移动所述污染物颗粒流体连通; 和预定的时间周期之后，去除从注入的粒子收集器。 与离子注入器的粒子收集器（10）（74），用于捕获并除去上通过在离子束穿过所述注入机的抽真空的内部区域移动在污染物颗粒组合因此盘游离缺失，粒子收集器包括一个表面，以哪个污染物颗粒 容易粘附和用于可释放地固定在粒子收集器，以检查所做的粒子粘附表面是在与真空管注入器的内部区域流体连通的植入固定装置（（76，78）。