-
公开(公告)号：EP2469096A4
公开(公告)日：2015-12-09
申请号：EP10809774
申请日：2010-06-14
申请人： EDWARDS JAPAN LTD
发明人： MIWATA TOORU , ISHII KEIICHI , MACHIDA KATSUHIDE , OHTACHI YOSHINOBU , MAEJIMA YASUSHI , TAKAADA TSUTOMU
CPC分类号： F04D19/042 , F04D27/001 , F04D29/584 , F05D2270/303
摘要： To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump. One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater 147 and a magnetic valve 163 is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.
-
公开(公告)号：EP2472120A4
公开(公告)日：2017-08-02
申请号：EP10811581
申请日：2010-05-31
申请人： EDWARDS JAPAN LTD
CPC分类号： F04D19/042 , F04D25/0693 , F04D27/0292 , F04D29/522 , F04D29/601
摘要： To provide a vacuum pump in which possibilities of decreased exhaust performance and gas leakage at the time of breakage of a rotor are lessened, in the case where a rotating part closes the inside opening portion of an exhaust outlet portion to decrease the height dimension of the vacuum pump, and further a connector lead wire is installed easily. An inside opening edge portion of a gas discharge passage for combining the downstream space of the rotor with the exhaust outlet portion is caused to take a shape such that the opening edge portion has no blind portion when a gas exhaust passage forming member is viewed from at least either of an upper side or an oblique upper side, or from at least either of an lower side or an oblique lower side. Furthermore, the inner corner portion of this opening edge portion is formed into a rounded shape to reduce stress concentration. Also, a base is provided with a groove for combining a lead wire installing hole with a hole in the central part, and further the corners of these parts are formed into a rounded shape.
摘要翻译： 为了提供一种真空泵，其中减少了在转子断裂时排气性能和气体泄漏的可能性，在旋转部分关闭排气口部分的内部开口部分以降低其高度尺寸的情况下 真空泵，并且进一步容易地安装连接器引线。 用于将转子的下游空间与排气出口部分结合的气体排放通道的内侧开口边缘部分形成为使得当从中观察排气通道形成部件时开口边缘部分不具有盲区 上侧或斜上侧中的至少一个，或者从下侧或斜下侧中的至少任一个。 此外，该开口边缘部分的内拐角部分形成为圆形以减少应力集中。 而且，基座设置有用于将引线安装孔与中心部分中的孔结合的凹槽，并且这些部分的角部进一步形成为圆形。
-
公开(公告)号：EP3018354A4
公开(公告)日：2017-03-15
申请号：EP14820662
申请日：2014-06-06
申请人： EDWARDS JAPAN LTD
CPC分类号： F04D19/04 , F04D17/168 , F04D19/044 , F04D29/28 , F04D29/32 , F04D29/324 , F04D29/444 , F04D29/542 , F04D29/544 , F05D2240/122 , F05D2240/304 , F05D2250/70 , F05D2260/607
摘要： A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.
摘要翻译： 提供一种真空泵，其抑制螺纹槽的排气侧出口中的气体产物的出现并且长期保持泵性能。 真空泵包括流入抑制壁，所述流入抑制壁通过在内周侧定子的外周表面上沿着排气方向延伸的脊部的排气侧端部更大地形成，所述流入抑制壁在转子旋转方向上比进气侧端部 所述流入抑制壁抑制了在脊部之间雕刻的螺纹槽的排气侧出口中的气体滞留。
-
-
搜索结果
3 条记录 (耗时 0.01 秒)
