公开(公告)号：EP2795283A4

公开(公告)日：2015-07-22

申请号：EP12858924

申请日：2012-11-01

Applicant: ELECTRO SCIENT IND INC

Inventor： O'CONNOR CIARAN JOHN PATRICK ,  HILLIARD SHANE ,  SUMERFIELD LEIF

IPC: G01N1/00 ,  B23K26/06 ,  G01N27/64 ,  G02B5/00 ,  G02B27/00

CPC classification number: H01J49/164 ,  G02B5/005

Abstract: An apparatus can include a first beam cropper configured to crop a portion of a radiation pulse having a first spot size to form an intermediate cropped radiation pulse having an intermediate cropped spot with an intermediate cropped spot size less than the first spot size; and a second beam cropper configured to crop the intermediate cropped spot to form a second cropped radiation pulse having a second cropped spot with a second cropped spot size less the intermediate cropped spot size.

Abstract translation: 一种装置可以包括：第一光束裁剪器，被配置为裁剪具有第一光斑尺寸的辐射脉冲的一部分，以形成中间裁剪的辐射脉冲，该中间剪切辐射脉冲具有小于第一光点尺寸的中间裁剪光点尺寸的中间裁剪光点; 以及第二光束裁剪器，其被配置为裁剪所述中间裁剪光点以形成具有第二裁剪光斑的第二裁剪的辐射脉冲，其具有小于所述中间裁切光点尺寸的第二裁剪光斑尺寸。