公开(公告)号：EP1277042B1

公开(公告)日：2011-04-06

申请号：EP01973786.5

申请日：2001-04-26

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： CHAPMAN, Kenneth ,  DAHAN, Sam

IPC分类号： G01N21/88 ,  G06T7/00

CPC分类号： G01N21/88 ,  G01N21/95607 ,  G01N2021/95638 ,  G06T7/0002 ,  G06T7/0004 ,  G06T7/586 ,  G06T7/62 ,  G06T2207/30141 ,  G06T2207/30164

摘要： The present invention provides a method and an apparatus (10) for evaluating the surfaces of substrates (22) for three dimensional defects (20). The present invention uses low angled lighting (16, 18) positioned on opposite sides of the substrate. A camera (12), positioned above the substrate captures two images thereof, one using the first light source, one using the second. The first and second images are subtracted from one another to create a third image. Camera data suggestive of three dimensional features is emphasized by subtracting the two images and can be evaluated. A fourth image may be created by selecting the minimum values between the first and second images on a point by point basis. The fourth image also provides useful information in evaluating three dimensional defects.

公开(公告)号：EP1277042A2

公开(公告)日：2003-01-22

申请号：EP01973786.5

申请日：2001-04-26

申请人： ELECTRO SCIENTIFIC INDUSTRIES, INC.

发明人： CHAPMAN, Kenneth ,  DAHAN, Sam

IPC分类号： G01N21/88 ,  G06T7/00

CPC分类号： G01N21/88 ,  G01N21/95607 ,  G01N2021/95638 ,  G06T7/0002 ,  G06T7/0004 ,  G06T7/586 ,  G06T7/62 ,  G06T2207/30141 ,  G06T2207/30164

摘要： The present invention provides a method and an apparatus (10) for evaluating the surfaces of substrates (22) for three dimensional defects (20). The present invention uses low angled lighting (16, 18) positioned on opposite sides of the substrate. A camera (12), positioned above the substrate captures two images thereof, one using the first light source, one using the second. The first and second images are subtracted from one another to create a third image. Camera data suggestive of three dimensional features is emphasized by subtracting the two images and can be evaluated. A fourth image may be created by selecting the minimum values between the first and second images on a point by point basis. The fourth image also provides useful information in evaluating three dimensional defects.

摘要翻译： 本发明提供了一种用于评估三维缺陷的衬底表面的方法和装置。 本发明使用位于基板的相对侧上的低角度照明。 位于基板上方的相机捕获其两个图像，一个使用第一光源，一个使用第二光源。 将第一和第二图像相互减去以创建第三图像。 通过减去两个图像来强调三维特征的相机数据，并且可以被评估。 可以通过逐点地选择第一和第二图像之间的最小值来创建第四图像。 第四幅图像还提供了评估三维缺陷的有用信息。