摘要:
The present invention relates to a method for production of silane where particulate quartz in a fluidized bed is treated with a gas containing hydrogen at a temperature below 0° C., with the quartz in the fluidized bed subjected to an alternating electric field having a frequency equal to the intrinsic resonant frequency of at least a part of the quartz particles to create vibrational energy in the particles, thereby causing a chemical reaction between quartz and hydrogen to produce silane. The invention also relates to an apparatus for carrying out the method.