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公开(公告)号：EP0667921B1
公开(公告)日：2000-01-26
申请号：EP94901375.9
申请日：1993-11-10
IPC分类号： C23C16/02 , C23C16/50 , B05D1/04 , B05D3/06 , B29D22/00 , B29D23/00 , B65D23/02 , C23C16/40 , C23C16/54
CPC分类号： H01J37/32211 , B65D65/42 , C23C16/0209 , C23C16/0245 , C23C16/401 , C23C16/402 , C23C16/511 , C23C16/545 , H01J37/32192 , H01J37/3277
摘要： Method and apparatus for the simultaneous plasma assisted chemical vapor deposition of thin film material onto an elongated web of substrate material at a plurality of discrete spatially separated deposition zones (12). In order to accomplish said simultaneous deposition, the web of substrate material (10) is operatively positioned so as to assume a serpentine path of travel through a reduced pressure enclosure (1). By using an elongated linear applicator (4) as a source of microwave energy, a high rate of uniform deposition of said thin film material over a plurality of large areas of the web substrate material can be simultaneously achieved without heating of said web above the melting point thereof. In a preferred embodiment, the web of substrate material is formed of a low temperature, microwave transmissive synthetic plastic resin and the thin film material deposited thereupon forms a barrier coating for preventing oxygen diffusion therethrough.
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公开(公告)号：EP0667921A1
公开(公告)日：1995-08-23
申请号：EP94901375.0
申请日：1993-11-10
CPC分类号： H01J37/32211 , B65D65/42 , C23C16/0209 , C23C16/0245 , C23C16/401 , C23C16/402 , C23C16/511 , C23C16/545 , H01J37/32192 , H01J37/3277
摘要： Method and apparatus for the simultaneous plasma assisted chemical vapor deposition of thin film material onto an elongated web of substrate material at a plurality of discrete spatially separated deposition zones (12). In order to accomplish said simultaneous deposition, the web of substrate material (10) is operatively positioned so as to assume a serpentine path of travel through a reduced pressure enclosure (1). By using an elongated linear applicator (4) as a source of microwave energy, a high rate of uniform deposition of said thin film material over a plurality of large areas of the web substrate material can be simultaneously achieved without heating of said web above the melting point thereof. In a preferred embodiment, the web of substrate material is formed of a low temperature, microwave transmissive synthetic plastic resin and the thin film material deposited thereupon forms a barrier coating for preventing oxygen diffusion therethrough.
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