专利检索 ap:("ESASHI, Masayoshi") AND inv:"KATSUMATA, Takashi" 第 1 页

1.

发明授权
PRESSURE SENSOR AND A METHOD OF MANUFACTURING THE SAME 有权
标题翻译：压力传感器和相同的方法

公开(公告)号：EP0997721B1

公开(公告)日：2013-04-10

申请号：EP98954712.0

申请日：1998-11-17

申请人： ESASHI, Masayoshi

发明人： ESASHI, Masayoshi , HAGA, Yoichi Room 1003 , KATSUMATA, Takashi

IPC分类号： G01L9/00

CPC分类号： G01L9/0077

2.

发明公开
PRESSURE SENSOR AND A METHOD OF MANUFACTURING THE SAME 有权
标题翻译：压力传感器和相同的方法

公开(公告)号：EP0997721A1

公开(公告)日：2000-05-03

申请号：EP98954712.0

申请日：1998-11-17

申请人： ESASHI, Masayoshi

发明人： ESASHI, Masayoshi , HAGA, Yoichi Room 1003 , KATSUMATA, Takashi

IPC分类号： G01L9/00

CPC分类号： G01L9/0077

摘要： A reflective type movable diaphragm unit 2 is formed on a groove 26-carrying silicon substrate 3, and a bonding agent layer serving also as a spacer 24 is provided around the diaphragm unit, this spacer 24 being bonded to a half mirror layer 11 of an optical fiber 1 with a cross-sectionally semicircular diaphragm portion 25 further provided on the diaphragm unit 2, whereby a pressure sensor is formed.