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公开(公告)号:EP0842409A1
公开(公告)日:1998-05-20
申请号:EP96925778.0
申请日:1996-07-12
IPC分类号: G01M11
CPC分类号: G01M11/0257 , G01M11/0271
摘要: A fringe deflectometry apparatus including lighting means (1, 2, 3, 4, 5, 6, 7, 8) for illuminating an optical component to be measured using radiation having a known wavefront; deflectometric means (14) for measuring the deflection of the radiation after it has been reflected or transmitted by said optical component to be measured; and means (25, 26) for materialising a reference beam. The apparatus further includes means (27) for measuring the transverse aberration of the reference beam after it has been reflected or transmitted by said optical component to be measured. A deflectometry method using such an apparatus enables an absolute phase reference to be provided.
摘要翻译: 一种条纹偏转测量装置,包括:照明装置(1,2,3,4,5,6,7,8),用于使用具有已知波前的辐射照射待测量的光学部件; 用于测量辐射在被所述待测光学部件反射或透射之后的偏转的偏转装置(14) 和用于实现参考光束的装置(25,26)。 该设备还包括用于在参考光束已被所述待测光学元件反射或透射之后测量其横向像差的装置(27)。 使用这种装置的偏转法可以提供绝对的相位参考。
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公开(公告)号:EP0842409B1
公开(公告)日:2001-02-21
申请号:EP96925778.1
申请日:1996-07-12
IPC分类号: G01M11/02
CPC分类号: G01M11/0257 , G01M11/0271
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