公开(公告)号：EP3388676B1

公开(公告)日：2020-11-04

申请号：EP18166827.8

申请日：2018-04-11

申请人： Ebara Corporation

发明人： LIN, Jie Yuan ,  IWASAKI, Koichi ,  OSUGA, Toru ,  ISHII, Yuji ,  KAWASHIMA, Hiroyasu ,  SHIMADA, Seiji

IPC分类号： F04C25/02 ,  F04C28/06 ,  F04C28/28 ,  F04C23/00

公开(公告)号：EP3388676A1

公开(公告)日：2018-10-17

申请号：EP18166827.8

申请日：2018-04-11

申请人： Ebara Corporation

发明人： LIN, Jie Yuan ,  IWASAKI, Koichi ,  OSUGA, Toru ,  ISHII, Yuji ,  KAWASHIMA, Hiroyasu ,  SHIMADA, Seiji

IPC分类号： F04C25/02 ,  F04C28/06 ,  F04C28/28 ,  F04C23/00

摘要： A vacuum pump that is more compact and lower in cost as compared with prior arts is provided. A vacuum pump assembly 1 includes a main pump 10 and a booster pump 20. Each of the pumps has an intake port 11a, 21a and an exhaust port 11b, 21b. The intake port 1 la of the main pump 10 intercommunicates with the exhaust port 21b of the booster pump 20. A switch receives a start instruction for starting the main pump 10. When the switch receives the start instruction and the main pump 10 starts, it is determined based on the start instruction whether the booster pump 20 is started, and the booster pump 20 is started.