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公开(公告)号:EP3388676A1
公开(公告)日:2018-10-17
申请号:EP18166827.8
申请日:2018-04-11
申请人: Ebara Corporation
发明人: LIN, Jie Yuan , IWASAKI, Koichi , OSUGA, Toru , ISHII, Yuji , KAWASHIMA, Hiroyasu , SHIMADA, Seiji
摘要: A vacuum pump that is more compact and lower in cost as compared with prior arts is provided. A vacuum pump assembly 1 includes a main pump 10 and a booster pump 20. Each of the pumps has an intake port 11a, 21a and an exhaust port 11b, 21b. The intake port 1 la of the main pump 10 intercommunicates with the exhaust port 21b of the booster pump 20. A switch receives a start instruction for starting the main pump 10. When the switch receives the start instruction and the main pump 10 starts, it is determined based on the start instruction whether the booster pump 20 is started, and the booster pump 20 is started.
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公开(公告)号:EP3388676B1
公开(公告)日:2020-11-04
申请号:EP18166827.8
申请日:2018-04-11
申请人: Ebara Corporation
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公开(公告)号:EP3597916A1
公开(公告)日:2020-01-22
申请号:EP18766870.2
申请日:2018-03-13
申请人: Ebara Corporation
发明人: MAISHIGI, Keiji , SUGIURA, Tetsuro , USUI, Katsuaki , HATAKEYAMA, Masahiro , HONMA, Chikako , OSUGA, Toru , IWASAKI, Koichi , LIN, Jie Yuan
IPC分类号: F04B51/00 , G05B19/418
摘要: An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including:
a determination unit configured to determine a normal variation range or a normal time variation behavior of a target state quantity which is a state quantity varying depending on a load of gas flowing into the vacuum pump, based on at least one of past target state quantities of the target vacuum pump or another vacuum pump; and
a comparison unit configured to compare a current target state quantity of the target vacuum pump with the normal variation range or the normal time variation behavior and output the comparison result.
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