公开(公告)号：EP1769158B1

公开(公告)日：2013-12-18

申请号：EP05761329.1

申请日：2005-07-19

申请人： Edwards Limited

发明人： SMITH, James Robert, BOC Edwards ,  SEELEY, Andrew James, BOC Edwards

IPC分类号： F04C19/00 ,  C23C16/44

CPC分类号： F04C19/00 ,  C23C16/4412 ,  F04F5/54 ,  Y02C20/30

摘要： Low-cost apparatus is described for treating an effluent fluid stream from a process tool. In one embodiment, the apparatus comprises an abatement device (12) and a liquid ring pump (14) for at least partially evacuating the abatement device (12). During use, the abatement device (12) converts one or more components of the effluent stream, for example F2 or a PFC, into one or more liquid-soluble a compounds, for example HF, that are less harmful to the environment. The liquid ring pump (14) receives the effluent stream and a liquid, and exhausts a solution of the liquid and the liquid-soluble component of the effluent stream. The liquid ring pump (14) thus operates as both a wet scrubber and an atmospheric vacuum pumping stage.

公开(公告)号：EP1715937B1

公开(公告)日：2013-04-10

申请号：EP05717757.8

申请日：2005-02-18

申请人： Edwards Limited

发明人： SMITH, James Robert, BOC Edwards ,  SEELEY, Andrew James, BOC Edwards ,  RADOIU, Marilena

IPC分类号： B01D53/70 ,  B01D53/68 ,  B01J19/08 ,  B01J19/12 ,  C23C16/44

CPC分类号： B01J19/088 ,  B01D53/68 ,  B01D53/70 ,  B01D2257/2047 ,  B01D2257/2066 ,  B01D2259/818 ,  B01J2219/0896 ,  G03F7/70925 ,  Y02C20/30

公开(公告)号：EP1773474B1

公开(公告)日：2010-04-28

申请号：EP05768057.1

申请日：2005-08-02

申请人： Edwards Limited

发明人： STANTON, Gareth, BOC Edwards ,  SEELEY, Andrew James, BOC Edwards ,  SMITH, James Robert, BOC Edwards

IPC分类号： B01D53/68 ,  B01D53/30 ,  F23G7/06 ,  F23D14/00

CPC分类号： B01D53/68 ,  B01D53/30 ,  B01D2257/2047 ,  Y02C20/30

摘要： Apparatus is described for treating an effluent fluid stream from a semiconductor manufacturing process tool. The apparatus comprises a combustion chamber, means for heating the combustion chamber, and a nozzle for injecting the effluent stream into the combustion chamber. The apparatus is configured to enable a fuel and an oxidant to be selectively injected into the effluent stream as required to optimise the combustion conditions for a particular effluent stream. In one to embodiment, a lance projecting into the nozzle selectively injects an oxidant into the effluent stream, and a sleeve surrounding the nozzle selectively injects a fuel into the effluent stream.