公开(公告)号：EP3057707A1

公开(公告)日：2016-08-24

申请号：EP14761992.8

申请日：2014-09-10

申请人： Endress+Hauser Flowtec AG

发明人： HUBER, Christof ,  FETH, Hagen ,  STEINHOFF, Frank ,  REINECKE, Holger

IPC分类号： B01L3/00

CPC分类号： B01L3/502 ,  B01L3/502715 ,  B01L3/565 ,  B01L9/52 ,  B01L2200/026 ,  B01L2200/0689 ,  B01L2300/0627 ,  B01L2300/0645 ,  B01L2300/0832 ,  B01L2300/0887 ,  B01L2300/12 ,  G01D11/30 ,  G01N2030/6013

摘要： A measurement arrangement comprising: a) a carrier element (14, 21, 32, 41) with a longitudinal axis (A), on which carrier element there is arranged a sensor (22, 33) for determining a process variable of a gaseous or liquid fluid, and b) the sensor (22, 33), wherein the sensor (22, 33) has a fluid duct (34) which extends within the sensor (22, 33), and wherein the carrier element has a fluid duct, characterized in that the carrier element (14, 21, 32, 41) has, for the mechanical connection of the fluid duct (15, 24, 36) of the carrier element (14, 21, 32, 41) to the fluid duct (34) of the sensor (22, 33), a connection layer (38, 39) which extends over a subregion of a surface of the carrier element (14, 21, 32, 41) and over a subregion of a surface of the sensor (22, 33), wherein the connection layer (38, 39) has at least one fluorinated plastics connection, or wherein, for the connection of the fluid duct (15, 24, 36) of the carrier element (14, 21, 32, 41) to the fluid duct (34) of the sensor (1, 22, 33), the carrier element (14, 21, 32, 41) has in each case at least one connection element (23, 35, 42) which protrudes from the carrier element (14, 21, 32, 41) perpendicularly with respect to the longitudinal axis (A) and which projects into the fluid duct (34) of the sensor (1, 22, 33), and wherein the connection element (23, 35, 42) is fixed by means of a connection layer (38, 39) at least to the sensor (22, 33), and wherein said mechanical connection layer (23, 35, 42) has a fluorinated plastics connection.

公开(公告)号：EP2934754A1

公开(公告)日：2015-10-28

申请号：EP13780108.0

申请日：2013-10-16

申请人： Endress+Hauser Flowtec AG

发明人： WIEST, Achim ,  HUBER, Christof ,  FETH, Hagen ,  STEINHOFF, Frank

IPC分类号： B01L9/00 ,  B81B7/00 ,  G01F15/14

CPC分类号： G01D11/30 ,  B01L3/502715 ,  G01F15/14 ,  G01N33/0009

摘要： A measuring system comprising a) a carrier element (14, 21, 32, 41) having a longitudinal axis (A), on which carrier element a sensor (1, 22, 33) for determining a process variable of a gaseous or liquid fluid is arranged, and b) the sensor (1, 22, 33) wherein the sensor (1, 22, 33) has a fluid channel (34) and the carrier element (14, 21, 32, 41 ) has a fluid channel, characterized in that the carrier element (14, 21, 32, 41 ) has at least one connecting element (6, 7, 23, 35, 42) for connecting the fluid channel of the carrier element (14, 21, 32, 41) to the fluid channel (34) of the sensor (1, 22, 33), which connecting element projects from the carrier element (14, 21, 32, 41) perpendicular to the longitudinal axis (A) and protrudes into the fluid channel (34) of the sensor (1, 22, 33).

摘要翻译： 一种测量装置，包括：具有纵向轴线的支撑元件，其中传感器布置在所述支撑元件上以确定气态或液体流体的过程变量; 和所述传感器，其中所述传感器具有流体管道，并且其中所述支撑元件具有流体管道。 其特征在于，支撑元件用于将支撑元件的流体管道与传感器的流体管道连接，至少一个连接元件，其垂直于支撑元件的纵向轴线延伸并且进入传感器的流体管道 。

公开(公告)号：EP3368867A1

公开(公告)日：2018-09-05

申请号：EP16763274.4

申请日：2016-09-12

申请人： TrueDyne Sensors AG ,  Endress+Hauser Flowtec AG

发明人： REITH, Patrick ,  HUBER, Christof ,  FETH, Hagen

IPC分类号： G01F1/84

CPC分类号： G01F1/8445 ,  G01F1/8404 ,  G01F1/849 ,  G01F1/8495 ,  G01N9/36 ,  G01N11/16

摘要： The invention relates to a MEMS sensor for measuring at least one measurement variable, in particular a density, a flow rate, and/or a viscosity, of a flowing fluid, which has at least one microfluidic channel (1, 21) with at least one channel section (7, 7a, 27) which can be caused to vibrate, and comprises an exciter device (E) for exciting a use vibration mode in which the channel section (7, 7a, 27) executes vibrations in a predefined vibration plane (x-y), which has improved vibration properties, which are achieved in that the channel section (7, 7a, 27) consists of an anisotropic material with direction-dependent elasticity, which is spatially oriented in such a way that a modulus of elasticity of the material relevant for a stiffness of the channel section (7, 7a, 27) with respect to deflections of the channel section (7, 7a, 27) running perpendicular to the vibration plane (x-y) is greater than a modulus of elasticity relevant for a stiffness of the channel section (7, 7a, 27) with respect to deflections of the channel section (7, 7a, 27) running in the vibration plane (x-y).

公开(公告)号：EP2934754B1

公开(公告)日：2017-08-09

申请号：EP13780108.0

申请日：2013-10-16

申请人： Endress+Hauser Flowtec AG

发明人： WIEST, Achim ,  HUBER, Christof ,  FETH, Hagen ,  STEINHOFF, Frank

IPC分类号： B01L9/00 ,  B81B7/00 ,  G01F15/14 ,  B01L3/00 ,  G01D11/30 ,  G01N33/00

CPC分类号： G01D11/30 ,  B01L3/502715 ,  G01F15/14 ,  G01N33/0009