公开(公告)号：EP2904363A2

公开(公告)日：2015-08-12

申请号：EP13766300.1

申请日：2013-09-24

申请人： Endress+Hauser GmbH+Co. KG

发明人： LEMKE, Benjamin ,  ZIERMANN, René ,  POBERING, Sebastian ,  RÖDER, Ralf

IPC分类号： G01L9/00

CPC分类号： G01L9/065 ,  G01L9/0042 ,  G01L9/0052 ,  G01L9/085

摘要： The invention relates to a pressure sensor (1) comprising a substrate (2) having a formed measuring membrane (3) and an electrically conductive cover layer (4) which comprises electrical contact elements (5, 6, 7, 8) and which is electrically insulated in relation to the substrate (2) by means of an insulating layer (9). The cover layer (4) is structured such that in two regions (10, 11), that are electrically insulated from one another, two independent measurements of the respective resistance between two contact elements (5, 6, 7, 8) are possible. The regions (10, 11) of the cover layer (4) serve for shielding the sensor elements (12, 13) of the measuring membrane (3) from electromagnetic influences from the outside, for detecting damage to the measuring membrane (3) as well as for the exact temperature determination.

摘要翻译： 一种压力传感器，包括：具有形成在其中的测量膜的基板; 以及导电覆盖层，其具有电接触元件并且通过绝缘层与基板电隔离。 覆盖层被分割成使得两个接触元件之间的相应电阻的两个独立测量在彼此电隔离的两个区域中是可能的。 覆盖层的区域用于屏蔽来自测量膜的传感器元件的外部电磁影响，以便检测对测量膜的损伤以及用于确定精确温度。