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公开(公告)号：EP1299701B1
公开(公告)日：2004-07-14
申请号：EP01951515.4
申请日：2001-05-23
发明人： BURCZYK, Dietfried , DANNHAUER, Wolfgang , LÖFFLER, Frank , NÜRNBERGER, Ralf , SCHWABE, Friedrich
CPC分类号： G01L19/0084 , G01L13/025 , G01L19/0038 , G01L19/0645
摘要： The invention relates to a differential pressure sensor having a low hysteresis volume. Said sensor comprises a sensor element (1), two pressure measuring chambers (21, 31) which lie adjacent to the sensor element, two pressure receiving chambers (22, 32) which are closed by separating membranes (21, 31), and two overload chambers (23, 33) which are separated by an overload membrane (6), said overload membrane (6) comprising a closed outer edge and a closed inner edge and being firmly fixed along said outer and inner edge thereof.
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公开(公告)号：EP2223070A1
公开(公告)日：2010-09-01
申请号：EP08861996.0
申请日：2008-12-12
CPC分类号： G01L19/0609 , G01L9/0073 , G01L13/026
摘要： A differential pressure measuring cell (1) for detecting the pressure differential between a first pressure and a second pressure comprises: an elastic measuring arrangement having at least one measuring diaphragm (4, 203, 205), which has silicon; at least one carrier body (2, 5, 204), which is connected pressure-tight to the elastic measuring arrangement; a first hydraulic path, in order to transmit a first pressure to a first surface section of the elastic measuring arrangement; a second hydraulic path, in order to transmit a second pressure to a second surface section of the elastic measuring arrangement, wherein said first pressure counteracts said second pressure, and the elastic deflection of the measuring arrangement is a measure of the differential between the first pressure and the second pressure, wherein said differential pressure measuring cell also has at least one hydraulic throttle (9, 10, 211), characterized in that the at least one hydraulic throttle comprises porous silicon.
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公开(公告)号：EP2223070B1
公开(公告)日：2012-06-20
申请号：EP08861996.0
申请日：2008-12-12
CPC分类号： G01L19/0609 , G01L9/0073 , G01L13/026
摘要： A differential pressure measuring cell (1) for detecting the pressure differential between a first pressure and a second pressure comprises: an elastic measuring arrangement having at least one measuring diaphragm (4, 203, 205), which has silicon; at least one carrier body (2, 5, 204), which is connected pressure-tight to the elastic measuring arrangement; a first hydraulic path, in order to transmit a first pressure to a first surface section of the elastic measuring arrangement; a second hydraulic path, in order to transmit a second pressure to a second surface section of the elastic measuring arrangement, wherein said first pressure counteracts said second pressure, and the elastic deflection of the measuring arrangement is a measure of the differential between the first pressure and the second pressure, wherein said differential pressure measuring cell also has at least one hydraulic throttle (9, 10, 211), characterized in that the at least one hydraulic throttle comprises porous silicon.
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