公开(公告)号：EP2647028B8

公开(公告)日：2015-05-06

申请号：EP10787747.4

申请日：2010-12-03

申请人： Excillum AB

发明人： HEMBERG, Oscar ,  TUOHIMAA, Tomi

IPC分类号： H01J35/18

CPC分类号： H01J35/18 ,  H01J35/00 ,  H01J35/02 ,  H01J35/025 ,  H01J35/08 ,  H01J2235/082 ,  H01J2235/168 ,  H01J2235/183 ,  H05G1/08

公开(公告)号：EP2856493A1

公开(公告)日：2015-04-08

申请号：EP12725697.2

申请日：2012-05-29

申请人： Excillum AB

发明人： TUOHIMAA, Tomi ,  HEMBERG, Oscar

IPC分类号： H01J35/18

CPC分类号： H01J35/18 ,  H01J35/025 ,  H05G1/02

摘要： An X-ray window comprises a primary (22) and a secondary window element (72, 74, 76). In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the secondary window element via a charge-drain layer (76). To prevent large debris particles from short-circuiting the secondary window element, the current for heating the window element flows through heating circuitry (72) which is electrically insulated from the charge- drain layer.

摘要翻译： X射线窗口包括主要窗口元件（22）和次要窗口元件（72,74,76）。 为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。 同时，源自电子照射和/或沉积带电粒子的电荷将经由电荷 - 漏极层（76）从副窗口元件排出。 为了防止大的碎片颗粒使次窗元件短路，用于加热窗元件的电流流过与电荷漏层电绝缘的加热电路（72）。

公开(公告)号：EP3089192B1

公开(公告)日：2018-05-09

申请号：EP16175161.5

申请日：2011-12-21

申请人： Excillum AB

发明人： HEMBERG, Oscar ,  TUOHIMAA, Tomi ,  SUNDMAN, Björn

IPC分类号： H01J35/14 ,  H05G1/52 ,  H01J35/08

CPC分类号： H01J35/14 ,  H01J35/08 ,  H01J2235/082 ,  H05G1/52

摘要： The invention provides a technique for indirectly measuring the degree of alignment of a beam in an electron-optical system comprising aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practised in connection with an X-ray source which is operable to produce an X-ray target, the invention further proposes a technique for determining and controlling a width of an electronbeam at its intersection point with the target.

公开(公告)号：EP2862182B1

公开(公告)日：2018-01-31

申请号：EP12730852.6

申请日：2012-06-14

申请人： Excillum AB

发明人： HEMBERG, Oscar ,  TUOHIMAA, Tomi ,  TAKMAN, Per

IPC分类号： G21K5/04 ,  H01J35/04

CPC分类号： H01J29/62 ,  G21K1/08 ,  G21K5/04 ,  H01J35/04 ,  H01J35/08 ,  H01J35/14 ,  H01J2235/082 ,  H01J2235/16

摘要： In an electron irradiation system, a gas-tight housing encloses a cathode region and an irradiation region, which communicate through at least an aperture. In the cathode region, there is arranged a high-voltage cathode for emitting an electron beam. In the irradiation region, there is an irradiation site arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.

公开(公告)号：EP2862182A1

公开(公告)日：2015-04-22

申请号：EP12730852.6

申请日：2012-06-14

申请人： Excillum AB

发明人： HEMBERG, Oscar ,  TUOHIMAA, Tomi ,  TAKMAN, Per

IPC分类号： G21K5/04 ,  H01J35/04

CPC分类号： H01J29/62 ,  G21K1/08 ,  G21K5/04 ,  H01J35/04 ,  H01J35/08 ,  H01J35/14 ,  H01J2235/082 ,  H01J2235/16

摘要： In an electron irradiation system, a gas-tight housing encloses a cathode region and an irradiation region, which communicate through at least an aperture. In the cathode region, there is arranged a high-voltage cathode for emitting an electron beam. In the irradiation region, there is an irradiation site arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.

摘要翻译： 在电子照射系统中，气密壳体包围通过至少一个孔连通的阴极区域和照射区域。 在阴极区域设置有用于发射电子束的高电压阴极。 在照射区域中，设置有用于容纳被照射的静止或移动物体的照射部位。 阴极降解碎屑的迁移通过设计用于防止带正电荷的颗粒经由孔径进入阴极区域的电场而受到限制。 本发明可以用实现能量阈值的轴向电场或使带电粒子偏离导入阴极区域的轨迹的横向场来实现。

公开(公告)号：EP2647028A1

公开(公告)日：2013-10-09

申请号：EP10787747.4

申请日：2010-12-03

申请人： Excillum AB

发明人： HEMBERG, Oscar ,  TUOHIMAA, Tomi

IPC分类号： H01J35/18

CPC分类号： H01J35/18 ,  H01J35/00 ,  H01J35/02 ,  H01J35/025 ,  H01J35/08 ,  H01J2235/082 ,  H01J2235/168 ,  H01J2235/183 ,  H05G1/08

摘要： An X-ray window comprises a primary (22) and a secondary (70) window element. In order to evaporate debris by ohmic heating, current flows through the secondary (upstream) window element. Meanwhile, electric charge originating from electron irradiation and/or depositing charged particles is to be drained off the window element. To prevent large debris particles from short-circuiting the window element and changing the desired heating pattern, the current for heating the window element flows through a layer (72) which is insulated from the charge-drain layer (76).

摘要翻译： 一个X射线窗口包括一个主窗口（22）和一个次窗口（70）。 为了通过欧姆加热来蒸发碎片，电流流过次级（上游）窗口元件。 同时，源自电子照射和/或沉积带电粒子的电荷将从窗口元件排出。 为了防止大的碎片颗粒使窗元件短路并改变所需的加热图案，用于加热窗元件的电流流过与电荷排出层（76）绝缘的层（72）。

公开(公告)号：EP3089192A1

公开(公告)日：2016-11-02

申请号：EP16175161.5

申请日：2011-12-21

申请人： Excillum AB

发明人： HEMBERG, Oscar ,  TUOHIMAA, Tomi ,  SUNDMAN, Björn

IPC分类号： H01J35/14 ,  H01J35/08

CPC分类号： H01J35/14 ,  H01J35/08 ,  H01J2235/082 ,  H05G1/52

摘要： The invention provides a technique for indirectly measuring the degree of alignment of a beam in an electron-optical system comprising aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practised in connection with an X-ray source which is operable to produce an X-ray target, the invention further proposes a technique for determining and controlling a width of an electronbeam at its intersection point with the target.

摘要翻译： 本发明提供了一种用于间接测量包括对准装置，聚焦装置和偏转装置的电子 - 光学系统中的光束对准程度的技术。 为了进行测量，可以使用简单的传感器，即使是单元件传感器，只要它具有明确的空间范围。 当与可操作以产生X射线靶的X射线源相结合时，本发明还提出了一种用于确定和控制与靶的交点的电子束宽度的技术。

公开(公告)号：EP2856493B1

公开(公告)日：2016-08-31

申请号：EP12725697.2

申请日：2012-05-29

申请人： Excillum AB

发明人： TUOHIMAA, Tomi ,  HEMBERG, Oscar

IPC分类号： H01J35/18

CPC分类号： H01J35/18 ,  H01J35/025 ,  H05G1/02

公开(公告)号：EP2656369B1

公开(公告)日：2016-07-13

申请号：EP11808967.1

申请日：2011-12-21

申请人： Excillum AB

发明人： SUNDMAN, Björn ,  TUOHIMAA, Tomi ,  HEMBERG, Oscar

IPC分类号： H05G1/52 ,  H01J35/14 ,  H01J35/08

CPC分类号： H01J35/14 ,  H01J35/08 ,  H01J2235/082 ,  H05G1/52

摘要： The invention provides a technique for indirectly measuring the degree of alignment of a beam in an electron-optical system comprising aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practised in connection with an X-ray source which is operable to produce an X-ray target, the invention further proposes a technique for determining and controlling a width of an electronbeam at its intersection point with the target.

公开(公告)号：EP2415065A1

公开(公告)日：2012-02-08

申请号：EP09776509.3

申请日：2009-04-03

申请人： Excillum AB

发明人： HEMBERG, Oscar ,  TUOHIMAA, Tomi ,  OTENDAL, Mikael

IPC分类号： H01J35/08

CPC分类号： H01J35/08 ,  G03F7/70033 ,  H01J35/12 ,  H01J2235/082 ,  H01J2235/1204 ,  H01J2235/1279 ,  H05G2/003 ,  H05G2/008

摘要： Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method according to the invention, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump (312). The pressurized liquid metal is then conducted to a nozzle (332) and ejected into a vacuum chamber (330) in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir (334), and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump (322), suitable for the inlet of the high-pressure pump. The invention also relates to a corresponding circulation system and an X-ray source provided with such circulation system.