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公开(公告)号：EP4428895A1
公开(公告)日：2024-09-11
申请号：EP22890424.9
申请日：2022-11-04
Applicant: Vatech Co., Ltd. , Vatech Ewoo Holdings Co., Ltd.
Inventor： KANG, Jung Su , KIM, Kun Hwan , LEE, Yang Doo
Abstract: The present invention provides an X-ray source comprising: an anode electrode on which a target is formed; a tubular-shaped first housing which is made of an insulating material and at one end of which the anode electrode is provided; a tubular-shaped second housing which is made of a conductive material and one end of which is connected to the first housing; and a cathode electrode which is provided at the other end of the second housing and has an emitter formed opposite to the target.
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公开(公告)号：EP2718936B1
公开(公告)日：2018-11-14
申请号：EP12729726.5
申请日：2012-05-30
Inventor： VOGTMEIER, Gereon , PIETIG, Rainer , LOEF, Christoph , DUERR, Martin, Kimutai , CARLSON, Gerald, James
Abstract: For the generation of multiple-energy X-ray radiation, an X-ray tube (10) for generating multiple-energy X-ray radiation includes an anode (12) and a filter (14). At least a first (16) and a second focal spot position (18) are offset from each other in an offset direction (20) transverse to an X-ray radiation projection direction. The filter includes a first plurality (22) of first portions (24) with first filtering characteristics for X-ray radiation and a second plurality (26) of second portions (28) with second filtering characteristics for X-ray radiation. The filter is a directional filter adapted in a such a way that at least a first X-ray beam (30) emanating from the first focal spot position at least partly passes through the filter unit via the first portions, and a second X-ray beam (32) emanating from the second focal spot position passes obliquely through the first and the second portions when passing through the filter unit.
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3.发明公开
公开(公告)号：EP3396697A1
公开(公告)日：2018-10-31
申请号：EP15911415.6
申请日：2015-12-25
Applicant: Nikon Corporation , Nikon Metrology NV
Inventor： YAMADA, Atsushi , SUZUKI, Shohei , ENDO, Takeshi , WATANABE, Takashi , FLETCHER, Stephen , DENYSOV, Andriy
Abstract: A charged particle device includes an electron emitting part for emitting electrons, an electron irradiated part configured to be irradiated with the electrons emitted from the electron emitting part, a container part configured to evacuate an interior thereof and contain the electron irradiated part in the interior thereof, an electric wire containing part configured to be inserted from an outside of the container part via an insertion part provided in the container part to contain an electric wire through which electricity is conducted to the electron irradiated part contained in the container part, and an insertion-part-side protrusion part configured to surround the electric wire containing part and protrude from a vicinity of the insertion part on an inner wall of the container part to an interior of the container part.
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公开(公告)号：EP3394876A1
公开(公告)日：2018-10-31
申请号：EP16820256.2
申请日：2016-12-21
Applicant: Nikon Metrology NV
Inventor： HAIG, Ian, George
CPC classification number: H01J35/065 , H01J35/08 , H01J35/16 , H01J2235/0233 , H01J2235/088 , H01J2235/168
Abstract: A target assembly for an x-ray emission apparatus is disclosed. The apparatus may comprise a vacuum chamber. The vacuum chamber may have at least one conductive wall. The apparatus may comprise an insulating element. The insulating element may project through the conductive wall. The apparatus may comprise a high voltage element. The high voltage element may extend along the insulating element. The high voltage element may extend from outside the chamber. The high voltage element may extend to an end portion of the insulating element furthest from the conductive wall. The apparatus may comprise an x-ray-generating target. The x-ray-generating target may be arranged at the end portion of the insulating element. The x-ray generating target may be electrically connected to the high voltage element. The apparatus may comprise a suppressive electrode. This suppressive electrode may be arranged at the end portion of the insulating element. This suppressive electrode may be configured to suppress acceleration towards the outer surface of the insulating element of electrons which are emitted from a junction between the outer surface of the insulating element and an inner surface of the conductive wall. An x-ray emission apparatus is also disclosed. The x-ray emission apparatus may comprise the target assembly. The apparatus may comprise an electron beam apparatus. The electron beam apparatus may be arranged to accelerate a beam of electrons towards an x-ray-generating target. The x-ray emission apparatus may thereby generate x-ray radiation.
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公开(公告)号：EP1931812B1
公开(公告)日：2018-10-24
申请号：EP06803322.4
申请日：2006-09-12
Inventor： COWAN, Thomas E. , MALEKOS, Steven , KORGAN, Grant , ADAMS, Jesse , SENTOKU, Yasuhiko , LE GALLOUDEC, Nathalie , FUCHS, Julien
CPC classification number: H05H1/24 , G21B1/19 , H01J35/08 , H05G2/00 , H05G2/001 , H05G2/008 , H05H1/02 , Y02E30/16 , Y10T428/12 , Y10T428/12299 , Y10T428/1241 , Y10T428/12493 , Y10T428/12806 , Y10T428/12868 , Y10T428/12889 , Y10T428/13
Abstract: In particular embodiments, the present disclosure provides targets including a metal layer and defining a hollow inner surface. The hollow inner surface has an internal apex. The distance between at least two opposing points of the internal apex is less than about 15 μm. In particular examples, the distance is less than about 1 μm. Particular implementations of the targets are free standing. The targets have a number of disclosed shaped, including cones, pyramids, hemispheres, and capped structures. The present disclosure also provides arrays of such targets. Also provided are methods of forming targets, such as the disclosed targets, using lithographic techniques, such as photolithographic techniques. In particular examples, a target mold is formed from a silicon wafer and then one or more sides of the mold are coated with a target material, such as one or more metals.
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Patent Agency Ranking
公开(公告)号：EP3089192B1
公开(公告)日：2018-05-09
申请号：EP16175161.5
申请日：2011-12-21
Applicant: Excillum AB
Inventor： HEMBERG, Oscar , TUOHIMAA, Tomi , SUNDMAN, Björn
CPC classification number: H01J35/14 , H01J35/08 , H01J2235/082 , H05G1/52
Abstract: The invention provides a technique for indirectly measuring the degree of alignment of a beam in an electron-optical system comprising aligning means, focusing means and deflection means. To carry out the measurements, a simple sensor may be used, even a single-element sensor, provided it has a well-defined spatial extent. When practised in connection with an X-ray source which is operable to produce an X-ray target, the invention further proposes a technique for determining and controlling a width of an electronbeam at its intersection point with the target.
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公开(公告)号：EP2862182B1
公开(公告)日：2018-01-31
申请号：EP12730852.6
申请日：2012-06-14
Applicant: Excillum AB
Inventor： HEMBERG, Oscar , TUOHIMAA, Tomi , TAKMAN, Per
CPC classification number: H01J29/62 , G21K1/08 , G21K5/04 , H01J35/04 , H01J35/08 , H01J35/14 , H01J2235/082 , H01J2235/16
Abstract: In an electron irradiation system, a gas-tight housing encloses a cathode region and an irradiation region, which communicate through at least an aperture. In the cathode region, there is arranged a high-voltage cathode for emitting an electron beam. In the irradiation region, there is an irradiation site arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.
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公开(公告)号：EP3240011A1
公开(公告)日：2017-11-01
申请号：EP17168100.0
申请日：2017-04-26
Applicant: Varex Imaging Corporation
Inventor： CANFIELD, Bradley , MEILER, Michael , WOODMAN, Colton , YOON, Inwoo
CPC classification number: H05G1/52 , A61B6/035 , A61B6/54 , A61B6/582 , A61B6/584 , H01J35/06 , H01J35/08 , H01J35/14 , H01J35/305
Abstract: Technology is described for electronically aligning a central ray 352 of an x-ray tube 210 to a radiation detector 240. In an example, an x-ray system includes an x-ray tube and a tube control unit (TCU). The x-ray tube includes a cathode that includes an electron emitter configured to emit an electron beam, an anode configured to receive the electron beam and generate x-rays with a central ray from electrons of the electron beam colliding on a focal spot of the anode, and a steering magnetic multipole between the cathode and the anode that is configured to produce a steering magnetic field from a steering signal. At least two poles of the steering magnetic multipole are on opposite sides of the electron beam. The TCU includes at least one steering driver configured to generate the steering signal. The TCU is configured to convert an offset value to the steering signal.
Abstract translation: 描述了用于将X射线管210的中心射线352与辐射检测器240电子对准的技术。在一个示例中，X射线系统包括X射线管和管控制单元（TCU）。 所述X射线管包括阴极，所述阴极包括被配置为发射电子束的电子发射器，被配置为接收所述电子束并且产生具有来自所述电子束的电子的中心射线的X射线，所述电子束在所述 以及在阴极和阳极之间的转向磁性多极，其被配置为从转向信号产生转向磁场。 转向磁性多极的至少两个极位于电子束的相对侧。 TCU包括至少一个被配置为产生转向信号的转向驱动器。 TCU被配置为将偏移值转换为转向信号。
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公开(公告)号：EP3152554A1
公开(公告)日：2017-04-12
申请号：EP15803316.7
申请日：2015-03-03
Applicant: Sigray Inc.
Inventor： LEWIS, Sylvia, Jia, Yun , YUN, Wenbing , KIRZ, Janos , LYON, Alan Fancis
IPC: G01N23/083 , G01T1/16
CPC classification number: H01J35/08 , G01N23/085 , G21K1/067 , G21K2201/062 , G21K2201/064 , H01J35/116 , H01J2235/086
Abstract: This disclosure presents systems for x-ray absorption fine structure (XAFS) measurements that have x-ray flux and flux density several orders of magnitude greater than existing compact systems; for applications of x-ray absorption near-edge spectroscopy (XANES) or extended x-ray fine absorption structure (EXFAS) spectroscopy. The higher brightness is achieved using designs for x-ray targets that comprise aligned microstructures of x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment with higher electron density and/or higher energy electrons, leading to greater x-ray brightness and high flux. The high brightness x-ray source is coupled to an x-ray reflecting optical system to collimate the x-rays, and a monochromator, which selects the exposure energy. Absorption spectra of samples using the high flux monochromatic x-rays can be made using standard detection techniques.
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10.发明公开
公开(公告)号：EP3093867A1
公开(公告)日：2016-11-16
申请号：EP16001053.4
申请日：2016-05-10
Applicant: Rigaku Corporation
Inventor： Nonoguchi, Masahiro , Noguchi, Manabu , Kato, Koichi , Nishida, Ryuji , Kusaka, Yuji , Kageyama, Masashi , Chaki, Tomohiro
CPC classification number: H01J35/14 , H01J35/025 , H01J35/08 , H01J2235/081 , H01J2235/086 , H01J2235/088 , H05G1/02 , H05G1/26
Abstract: Provided are an X-ray generator (1) capable of easily measuring a beam size of an electron beam on an electron target (17), and an adjustment method therefor. The X-ray generator includes an electron target (17) including a first metal, a second metal different from the first metal, and a third metal different from the second metal, which are sequentially arranged side by side along a first direction in a continuous manner.
Abstract translation: 提供能够容易地测量电子靶（17）上的电子束的光束尺寸的X射线发生器（1）及其调整方法。 X射线发生器包括：电子靶（17），其包括第一金属，不同于第一金属的第二金属和不同于第二金属的第三金属，其沿连续的第一方向并排布置 方式。
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