公开(公告)号：EP3550585A1

公开(公告)日：2019-10-09

申请号：EP18165886.5

申请日：2018-04-05

申请人： FEI Company

发明人： Hendriksen, Bastiaan Lambertus Martinus ,  Kieft, Erik René

IPC分类号： H01J37/28 ,  H01J37/244 ,  H01J37/04

摘要： A method of examining a dynamic specimen using a Transmission Charged Particle Microscope comprising:
- A source, for producing a beam of charged particles;
- A specimen holder, for holding the specimen in a specimen plane;
- An illumination system, for directing said beam onto the specimen;
- An imaging system, for directing charged particles that are transmitted through the specimen onto a detector in a detector plane,
specifically comprising:
- Sparsifying said beam so as to produce at detector level an image comprising a distribution of sub-images that are mutually isolated from one another at least along an elected scan path;
- Using a scanning assembly to cause relative motion of said image and said detector along said scan path during a time interval Δt, so as to smear out each sub-image into a detection streak on said detector, each such streak capturing temporal evolution of its associated sub-image during said time interval Δt.

公开(公告)号：EP3739613A1

公开(公告)日：2020-11-18

申请号：EP20174128.7

申请日：2020-05-12

申请人： FEI Company

发明人： Buijsse, Bart ,  Hendriksen, Bastiaan Lambertus Martinus ,  Dona, Pleun

IPC分类号： H01J37/04 ,  H01J37/28

摘要： Methods and systems for implementing laser-based phase plate image contrast enhancement are disclosed herein. An example method at least includes forming at least one optical peak in a diffraction plane of an electron microscope, and directing an electron beam through the at least one optical peak at a first location, where the first location determines an amount of phase manipulation the optical peak imparts to an electron of the electron beam.