公开(公告)号：EP3167694A1

公开(公告)日：2017-05-17

申请号：EP15730237.3

申请日：2015-06-12

申请人： FGV Cambridge Nanosystems Limited

发明人： PENNINGTON, Dale Andrew ,  CLAYTON, Aaron Robert ,  JUDA, Katarzyna Luiza ,  PAUKNER, Catharina ,  KURZEPA, Lukasz ,  ST. JOHN COOPER, Robert Henry ,  KOZIOL, Krzysztof Kazimierz ,  JOAUG, Jerome Yi-Zhe

IPC分类号： H05H1/46 ,  C01B32/182

CPC分类号： B01J19/126 ,  B01J19/088 ,  B01J19/129 ,  B01J2219/0869 ,  B01J2219/0875 ,  B01J2219/0892 ,  C01B32/184 ,  C01B32/20 ,  C01B2204/04 ,  H05H1/46 ,  H05H2001/4622

摘要： Apparatus and method are disclosed for plasma synthesis of graphitic products including graphene. A plasma nozzle is coupled to a reaction chamber. A process gas is supplied to the plasma nozzle, the process gas comprising a carbon-containing species. Radio frequency radiation is supplied to the process gas within the plasma nozzle, so as to produce a plasma within the nozzle in use, and thereby cause cracking of the carbon-containing species. The plasma nozzle is arranged such that an afterglow of the plasma extends into the reaction chamber. The cracked carbon-containing species also passes into the reaction chamber, and the cracked carbon-containing species recombines within the afterglow, so as to form the graphitic products including graphene.

摘要翻译： 公开了用于包括石墨烯的石墨产品的等离子体合成的设备和方法。 等离子体喷嘴连接到反应室。 处理气体被供应到等离子喷嘴，处理气体包含含碳物质。 将射频辐射提供给等离子体喷嘴内的处理气体，以便在使用中在喷嘴内产生等离子体，从而引起含碳物质的裂化。 等离子体喷嘴布置成使得等离子体的余辉延伸到反应室中。 裂化的含碳物质也进入反应室，裂化的含碳物质在余辉内重新结合，从而形成包括石墨烯的石墨产物。

公开(公告)号：EP3167694B1

公开(公告)日：2018-05-02

申请号：EP15730237.3

申请日：2015-06-12

申请人： FGV Cambridge Nanosystems Limited

发明人： PENNINGTON, Dale Andrew ,  CLAYTON, Aaron Robert ,  JUDA, Katarzyna Luiza ,  PAUKNER, Catharina ,  KURZEPA, Lukasz ,  ST. JOHN COOPER, Robert Henry ,  KOZIOL, Krzysztof Kazimierz ,  JOAUG, Jerome Yi-Zhe

IPC分类号： H05H1/46 ,  C01B32/182

CPC分类号： B01J19/126 ,  B01J19/088 ,  B01J19/129 ,  B01J2219/0869 ,  B01J2219/0875 ,  B01J2219/0892 ,  C01B32/184 ,  C01B32/20 ,  C01B2204/04 ,  H05H1/46 ,  H05H2001/4622

摘要： Apparatus and method are disclosed for plasma synthesis of graphitic products including graphene. A plasma nozzle is coupled to a reaction chamber. A process gas is supplied to the plasma nozzle, the process gas comprising a carbon-containing species. Radio frequency radiation is supplied to the process gas within the plasma nozzle, so as to produce a plasma within the nozzle in use, and thereby cause cracking of the carbon-containing species. The plasma nozzle is arranged such that an afterglow of the plasma extends into the reaction chamber. The cracked carbon-containing species also passes into the reaction chamber, and the cracked carbon-containing species recombines within the afterglow, so as to form the graphitic products including graphene.