METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS PROCESSED WITH A LASER BEAM
    1.
    发明公开
    METHOD AND DEVICE FOR CLEANING ELECTRONIC COMPONENTS PROCESSED WITH A LASER BEAM 审中-公开
    对于激光清洗方法和设备处理电子元件

    公开(公告)号:EP1900006A1

    公开(公告)日:2008-03-19

    申请号:EP06747591.3

    申请日:2006-06-15

    申请人: FICO B.V.

    IPC分类号: H01L21/00

    CPC分类号: H01L21/67092 H01L21/67057

    摘要: The present invention relates to a method for processing with a laser beam and cleaning electronic components, wherein at least one new boundary surface is formed on an electronic component with the laser beam. The invention also relates to a device for processing and cleaning electronic components, comprising at least: a laser source for generating a laser beam, and at least one carrier for supporting an assembly of unseparated electronic components, wherein the carrier and the laser beam are displaceable relative to each other.