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公开(公告)号：EP1934620A4
公开(公告)日：2012-06-06
申请号：EP06803803
申请日：2006-09-18
Applicant: FORMFACTOR INC
Inventor： DOZIER II THOMAS H , ELDRIDGE BENJAMIN N , HSU DAVID S , KHANDROS IGOR Y , MILLER CHARLES A
IPC: G01R31/319 , G01R31/28
CPC classification number: G01R31/2889 , G01R31/2893 , G01R31/31905
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