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公开(公告)号：EP0829017A1
公开(公告)日：1998-03-18
申请号：EP96915949.0
申请日：1996-05-22
CPC分类号： G01R33/0385 , G01Q60/54
摘要： The aim of the invention is to provide a process for producing magnetic probes for use in magnetic scanning force microscopy, consisting of a sharp ferromagnetic point and an elastically flexible lever arm. According to the invention, a ferromagnetic coating is applied to the point, following which a protective coating is deposited on the point by electron beam induction. Finally, the vapour-deposited ferromagnetic coating which bears no protective coating is removed. It is possible in this way to produce a probe with a ferromagnetically coated point in which the lateral expansion of the ferromagnetically coated region is 20 to 100 nm.
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公开(公告)号：EP0829017B1
公开(公告)日：1999-11-03
申请号：EP96915949.0
申请日：1996-05-22
IPC分类号： G01R33/038 , G01B7/34
CPC分类号： G01R33/0385 , G01Q60/54
摘要： The aim of the invention is to provide a process for producing magnetic probes for use in magnetic scanning force microscopy, consisting of a sharp ferromagnetic point and an elastically flexible lever arm. According to the invention, a ferromagnetic coating is applied to the point, following which a protective coating is deposited on the point by electron beam induction. Finally, the vapour-deposited ferromagnetic coating which bears no protective coating is removed. It is possible in this way to produce a probe with a ferromagnetically coated point in which the lateral expansion of the ferromagnetically coated region is 20 to 100 nm.
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