-
公开(公告)号：EP1202052A3
公开(公告)日：2004-02-04
申请号：EP01125102.2
申请日：2001-10-23
发明人： Zimmermann, Egon , Soltner, Helmut, Dr. , Glaas, Walter , Halling, Horst, Prof. Dr. , Faley, Mikhail, Dr.
IPC分类号： G01N27/82 , G01R33/035 , G01R33/038
CPC分类号： G01Q30/10 , G01N27/82 , G01Q30/12 , G01Q60/54 , G01R33/0385 , Y10S505/846
摘要： Die Erfindung betrifft ein Verfahren zur Messung magnetischer Eigenschaften einer Probe mit einem SQUID, wobei sich Probe und SQUID unter Umgebungsdruck gemeinsam in einer Stickstoffatmosphäre befinden. Dadurch wird einerseits die Kühlung für den SQUID sichergestellt, andererseits verhindert die Stickstoffatmosphäre eine Eisbildung auf der Probe. Das für dieses Verfahren geeignete erfindungsgemäße SQUID-Mikroskop umfaßt einen nach oben hin offenen Behälter, in dem sich sowohl die SQUID-Halterung (6) mit dem SQUID (1) als auch die Probenhalterung (7) mit der Probe (8) befindet. Vorteilhaft kann auf einfache Weise durch Einfüllen von flüssigem Stickstoff (3) in den nach oben hin offenen Behälter eine gasförmige Stickstoffatmosphäre eingestellt werden, in der die Probe (8) vermessen werden kann, ohne daß es nachteilig zum Ausfrieren oder Auskondensieren von Wasser auf der Probe kommt. Vorteilhaft können bei dieser Vorrichtung Probe (8) und SQUID (1) nahezu beliebig nahe aneinander geführt werden. Zudem ist ein Probenwechsel besonders einfach zu gestalten.
-
2.发明公开ELECTRONIC DEVICE SURFACE SIGNAL CONTROL PROBE AND METHOD OF MANUFACTURING THE PROBE 有权电子设备的表面信号命令probe及其制备方法
公开(公告)号：EP1054249A4
公开(公告)日：2003-07-23
申请号：EP99973122
申请日：1999-11-12
发明人： NAKAYAMA YOSHIKAZU , AKITA SEIJI , HARADA AKIO
IPC分类号： G01Q70/12 , B23Q17/09 , C01B31/02 , G01B5/28 , G01B7/34 , G01B21/30 , G01N1/04 , G01N13/00 , G01N19/02 , G01N21/75 , G01Q10/00 , G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/16 , G11B5/127 , G21G5/00 , G21K7/00
CPC分类号： G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/12 , Y10S977/869 , Y10S977/873 , Y10S977/876
摘要： A surface signal control probe high in resolution, rigidity, and bending elasticity which can be used for a scanning probe microscope and a highly accurate surface signal control probe for inputting and outputting signals which can be used for a high density magnetic information processing device, comprising a nanotube (24) small in tip curvature radius and high in rigidity and bending elasticity, a holder (2a) holding the nanotube (24), and a fixing means fixing the base part (24b) of the nanotube to the surface of the holder with the tip part (24a) of the nanotube (24) projecting from the holder, wherein the tip part (24a) of the nanotube is used as a probe and the fixing means is formed of a coating film (29) covering the base part (24b) of the nanotube (24) and a fused part where the base part (24b) is fused to the surface of the holder.
-
3.发明公开
公开(公告)号：EP0866341A3
公开(公告)日：2001-07-25
申请号：EP98301117.2
申请日：1998-02-16
IPC分类号： G01R33/038
CPC分类号： G01Q60/54 , G01Q60/56 , G01R33/0385 , Y10S977/849 , Y10S977/86 , Y10S977/865 , Y10S977/873 , Y10S977/887
摘要： An alternating current (AC) magnetic force microscopy (MFM) system incorporates an improved probe (10) with an integrated coil (11) on the free end of the system's cantilever (50). The probe (10) has a pair of magnetic poles (P1,P2) that form part of a magnetic yoke and a patterned electrically conductive coil (11) wound through the yoke. The probe (10) includes a probe tip (20) that has a magnetic surface layer that is magnetically coupled to one of the poles and extends from it. When alternating current from the AC-MFM system is passed through the probe coil (11) the magnetisation direction of the probe tip correspondingly alternates. The interaction of these alternating magnetic fields from the probe tip (20) with the magnetic fields emanating from the sample whose magnetic fields are to be measured causes the cantilever (50) to deflect between two extreme positions. The probe (10) can be formed from a portion of a disk drive air-bearing slider with a patterned thin film inductive write head on its trailing end by growing the probe tip (20) from the slider's air-bearing surface (ABS) so as to be in contact with the gap and one of the poles of the write head. The probe (10) can also be part of an integrated single-piece structure that includes the cantilever (50), probe body and probe tip (20) which are formed using conventional thin film deposition and lithographic processes.
-
公开(公告)号：EP0829017B1
公开(公告)日：1999-11-03
申请号：EP96915949.0
申请日：1996-05-22
IPC分类号： G01R33/038 , G01B7/34
CPC分类号： G01R33/0385 , G01Q60/54
摘要： The aim of the invention is to provide a process for producing magnetic probes for use in magnetic scanning force microscopy, consisting of a sharp ferromagnetic point and an elastically flexible lever arm. According to the invention, a ferromagnetic coating is applied to the point, following which a protective coating is deposited on the point by electron beam induction. Finally, the vapour-deposited ferromagnetic coating which bears no protective coating is removed. It is possible in this way to produce a probe with a ferromagnetically coated point in which the lateral expansion of the ferromagnetically coated region is 20 to 100 nm.
-
公开(公告)号：EP1425595A4
公开(公告)日：2008-04-16
申请号：EP01975166
申请日：2001-09-14
申请人： UNIV MARYLAND
IPC分类号： G01N27/72 , G01Q60/54 , G01R33/035 , G01R33/038 , H01L39/00
CPC分类号： G01R33/0358 , B82Y15/00 , B82Y25/00 , B82Y35/00 , G01Q60/54 , G01R33/0385
摘要： A scanning SQUID microscope (30) for acquiring spatially resolved images of physical properties of an object (84) includes a SQUID sensor (56) arranged in perpendicular to the plane of the object under investigation for detecting tangential component of the magnetic field generated by the object. During scanning of the SQUID sensor (56) over the object (84) under investigation, the position signal from a position interpreting unit, as well as relevant output signals from the SQUID sensor (56) are processed by a processing unit which derives from the data, spatially resolved images of the physical properties of the object. The specific orientation of the SQUID sensor (56) with respect to the plane of the object (84) permits an enlarged area of the SQUID chip on which the modulation and feedback line (100) can be fabricated in the same technological process with the SQUID sensor. Additionally, larger contact pads (120) afforded provide for lower contact resistance and ease in forming contact with bias and read-out wires.
-
公开(公告)号：EP1535305A2
公开(公告)日：2005-06-01
申请号：EP03788451.7
申请日：2003-08-14
发明人： XIAO, Gang
IPC分类号： H01J47/00
CPC分类号： G01Q60/54 , G01Q10/04 , G01Q30/04 , G01R33/0385
摘要： A scanning magnetic microscope SMM (20) includes a sensor (10) for sensing a magnetic field generated by a specimen (78), the sensor including one of a MTJ, a GMR, or an EHE sensor; translation apparatus (22A-C, 52) for translating the sensor relative to a surface of sad specimen; and a data processor (50), having an input coupled to an output of said sensor, for constructing an image of said magnetic field. The sensor preferably includes one to three sensing units each defining a sensing axis for sensing a component of a magnetic field from a specimen, the sensing units disposed such that the sensing axes are orthogonal to one another. Pluralities of such sensors can be disposed in two or three dimensional arrays. The SMM can be used for examining the current flow in ICs, electromigration, magnetic data storage media, biomagnetic systems and magnetic ink used to print currency.
-
7.发明公开
公开(公告)号：EP1459083A1
公开(公告)日：2004-09-22
申请号：EP02789020.1
申请日：2002-12-18
IPC分类号： G01R33/038 , G12B21/10
CPC分类号： G01Q60/50 , G01Q60/54 , G01Q60/56 , G01R33/0385
摘要： The invention relates to a probe for a magnetic force microscope, comprising a movable cantilever placed in the plane of a wafer and a tip placed substantially at right angles to the cantilever, wherein the cantilever is able to move and its oscillation direction is in the wafer plane, and the tip lies virtually in or parallel to this wafer plane.
-
公开(公告)号：EP1271554A3
公开(公告)日：2003-05-02
申请号：EP02013971.3
申请日：2002-06-25
申请人： HOKKAIDO UNIVERSITY
IPC分类号： G12B21/02
CPC分类号： G01Q60/54 , G01Q70/12 , G01Q70/18 , Y10S977/838 , Y10S977/869 , Y10S977/876
摘要： At the forefront of a probe (2) is formed a carbon nanotube (3) having an armchair type crystal structure or of which the forefront is chemically modified with modifying molecules. Furthermore, a spin polarization electron beam source (5) might be connected to said carbon nanotube (3).
摘要翻译： 在探针（2）的前端形成具有扶手椅型晶体结构或其前沿通过改性分子而被化学修饰的碳纳米管（3）。 此外，自旋极化电子束源（5）可能连接到所述碳纳米管（3）。
-
9.发明公开ELECTRONIC DEVICE SURFACE SIGNAL CONTROL PROBE AND METHOD OF MANUFACTURING THE PROBE 有权电子设备的表面信号命令probe及其制备方法
公开(公告)号：EP1054249A8
公开(公告)日：2002-01-30
申请号：EP99973122.7
申请日：1999-11-12
CPC分类号： G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/12 , Y10S977/869 , Y10S977/873 , Y10S977/876
摘要： The present invention realizes a probe with a high resolution, high rigidity and high bending elasticity which can be used in a scanning probe microscope and makes it possible to pick up images of surface atoms with a high resolution. Also, a high-precision input-output probe which can be used in high-density magnetic information processing devices is also realized. In order to accomplish the object, the electronic device surface signal operating probe of the present invention is constructed from a nanotube 24, a holder 2a which holds this nanotube 24, and a fastening means which fastens the base end portion 24b of the nanotube 24 to the surface of the holder so that the tip end portion 24a of the nanotube 24 protrudes; and the tip end portion 24a of the nanotube 24 is used as a probe needle. Furthermore, as one example of the fastening means, a coating film 29 which covers the base end portion 24b of the nanotube 24 is formed. If a coating film 30 is also formed on an intermediate portion 24c on the root side of the tip end portion, the strength of the probe needle and the resolution are further increased. As another example of the fastening means, the base end portion 24b of the nanotube 24 is fusion-welded to the holder surface. All or part of the base end portion 24b forms a fusion-welded part so that the nanotube 24 is firmly fastened to the holder. A common nanotube such as a carbon nanotube (CNT), BCN type nanotube or BN type nanotube, etc., can be used as the above-described nanotube. Since nanotubes have a small tip end curvature radius, signals can be operated at a high resolution. Furthermore, since nanotubes have a high rigidity and bending elasticity, they are extremely resistant to damage and have a long useful life. Moreover, since the raw materials are inexpensive, high-performance probes can be inexpensively obtained. Furthermore, such probes can be used as probe needles in scanning tunnel microscopes or atomic force microscopes, or as input-output probes in place of magnetic heads in magnetic disk drives.
-
公开(公告)号：EP0829017A1
公开(公告)日：1998-03-18
申请号：EP96915949.0
申请日：1996-05-22
CPC分类号： G01R33/0385 , G01Q60/54
摘要： The aim of the invention is to provide a process for producing magnetic probes for use in magnetic scanning force microscopy, consisting of a sharp ferromagnetic point and an elastically flexible lever arm. According to the invention, a ferromagnetic coating is applied to the point, following which a protective coating is deposited on the point by electron beam induction. Finally, the vapour-deposited ferromagnetic coating which bears no protective coating is removed. It is possible in this way to produce a probe with a ferromagnetically coated point in which the lateral expansion of the ferromagnetically coated region is 20 to 100 nm.
-
-
-
-
-
-
-
-
-
搜索结果
50 条记录 (耗时 0.009 秒)
