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公开(公告)号：EP0795042A1
公开(公告)日：1997-09-17
申请号：EP95941160.0
申请日：1995-11-29
CPC分类号： C23C16/0218 , C23C16/452
摘要： A superficial preoxydation of the substrate (2) is effected by placing it in contact with an oxidant gas excited by a cool plasma of the substrate (2) situated in the flow post-discharge of the cool plasma used to the oxidant element and heated to an oxidation temperature lower than 500 °C. At the surface of the preoxidized substrate (2), a metal oxide is provided by heterogenous oxidation of a metal halide by using a gas mixture comprising an oxidant element activated by a cool plasma. The oxidant gas mixture is set in contact with the halide at the closest vicinity of the substrate arranged in the remote flow post-discharge of the cool plasma. Preferably, the cool plasma is generated by micro-waves. The process may be used particularly for forming a protection coating on a casing tube of a nuclear fuel rod.
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2.发明授权Procédé de revêtement d'un substrat en métal ou alliage passivable par une couche d'oxyde 失效一种用于涂覆金属的passivatable Subtrates或合金与氧化物层的方法
公开(公告)号：EP0795042B1
公开(公告)日：1998-11-04
申请号：EP95941160.4
申请日：1995-11-29
CPC分类号： C23C16/0218 , C23C16/452
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公开(公告)号：EP0870074A1
公开(公告)日：1998-10-14
申请号：EP96941074.0
申请日：1996-11-28
CPC分类号： G21C3/18 , C23C16/0218 , C23C16/38 , C23C16/452 , Y02E30/40
摘要： A surface preoxidation of the substrate (5) is carried out by placing the substrate in contact with an oxidant gas excited in a cold plasma, the substrate (5) being placed in the post-discharge of the plasma flow and heated to a temperature lower than 480 °C. At a temperature lower than 500 °C, metal boride is deposited on the preoxidized substrate (5). The deposition of boride is obtained by placing in contact with each other and with the substrate (5) a metal halide, a boron compound and a reducer element, in the form of gas substances. At least one of the gas substances is excited in a cold plasma. The process is particularly intended to coat the internal surface or the external surface of the lining tube of zirconium alloy with a zirconium boride layer which absorbes the neutrons.
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