公开(公告)号：EP0922667A1

公开(公告)日：1999-06-16

申请号：EP98924654.1

申请日：1998-06-12

申请人： FUJIKIN Inc. ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  MINAMI, Yukio ,  KAWADA, Koji ,  TANABE, Yoshikazu ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro

IPC分类号： C01B5/00

CPC分类号： C01B5/00

摘要： Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and instantaneously reacting the reactivity-enhanced hydrogen and oxygen at a temperature below the ignition point to produce moisture without undergoing combustion at a high temperature, wherein the amount of unreacted hydrogen occurring in the generated moisture in starting up or terminating the moisture generating reaction is minimized and wherein undesired reactions such as undesired silicon oxide film coating are avoided. When the generation of moisture is started up by feeding hydrogen and oxygen into the reactor provided with a platinum-coated catalyst layer on the inside wall thereof, oxygen first starts to be fed and, some time after that, the supply of hydrogen is begun. In terminating the moisture generating operation by cutting off the supply of hydrogen and oxygen into the reactor, the feeding of hydrogen is first stopped and, some time after that, the supply of oxygen is shut off.

摘要翻译： 用于产生用于半导体制造中的湿气的方法，该方法包括将氢和氧进料到在内壁上设置有铂涂覆的催化剂层的反应器中，从而通过催化作用增强氢和氧之间的反应性，并使反应性 - 在低于点火点的温度下增强氢气和氧气，以产生水分，而不会在高温下经历燃烧，其中在产生水分的反应中启动或终止发生的水分中发生的未反应的氢气的量最小化，并且其中不期望的反应如 避免了不需要的氧化硅膜涂层。 当通过在其内壁上提供有铂包覆的催化剂层的反应器中加入氢气和氧气来启动水分的产生时，首先开始供给氧气，然后一段时间开始供应氢气。 在通过切断氢气和氧气进入反应器来终止湿气产生操作时，首先停止氢的供给，一段时间后，关闭氧气供应。

公开(公告)号：EP0878443A1

公开(公告)日：1998-11-18

申请号：EP97901265.5

申请日：1997-01-27

申请人： FUJIKIN Inc. ,  Hitachi, Ltd. ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  KAWADA, Koji ,  TANABE, Yoshikazu, Kabushiki-Kaisha Hitachi ,  NITTA, Takahisa, Kabushiki-Kaisha Hitachi ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro ,  HIRAO, Keiji ,  MOROKOSHI, Hiroshi ,  MINAMI, Yukio

IPC分类号： C01B5/00

CPC分类号： C01B5/00

摘要： The invention further reduces a size and cost of a reactor for generating water from oxygen and hydrogen, provides high-purity water in an amount necessary for practical use safely, stably and continuously, and allows a platinum-coated catalyst layer formed on an inner wall of a reactor body to maintain high catalytic activity over a long period of time. Specifically, the reactor comprises a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, has a gas-diffusing member provided in an internal space of the body, and has a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed from the inlet is diffused by the gas-diffusing member and then comes into contact with the platinum coating to enhance reactivity, thereby producing water from hydrogen and oxygen. A temperature of the reactor for generating moisture, wherein hydrogen is reacted with oxygen at a high temperature to generate moisture, is held to be below an ignition temperature of hydrogen or a hydrogen-containing gas so that hydrogen is reacted with oxygen while preventing explosive combustion of hydrogen and oxygen. The platinum-coated catalyst layer on the internal wall of the reactor body is formed by treating the surface of the internal wall of the body, cleaning the treated surface, forming a barrier coating of a nonmetallic material of an oxide or nitride on the wall surface, and forming the platinum coating on the barrier coating.

摘要翻译： 本发明进一步减小了尺寸和用于产生由氧气和氢气水的反应器的成本，提供了高纯度的水到所需量实际使用安全，稳定地和连续地，并允许形成在到内壁上的镀铂催化剂层 反应器主体的在一段长时间内保持高的催化活性。 具体地，该反应器包括一个由耐热材料制成，并在入口和出口，用于水/水分气体具有主体，具有气体扩散构件在所述主体的内部空间中设置于，并且具有铂在内部涂覆上 主体的壁面上。 氢气和氧气从所述入口供给由气体扩散构件扩散，然后与铂涂层接触，以提高反应性，从而由氢气和氧气产生水。 该反应器用于产生湿气，worin氢的温度在高温下与氧反应生成的水分，被保持为低于氢或含氢气体，从而也氢进行反应与氧气的燃点温度，同时防止爆炸燃烧 的氢气和氧气。 在反应器主体的内壁涂覆铂的催化剂层通过处理所述体的内壁的表面上，清洗处理过的表面，在壁表面上形成的氧化物或氮化物的非金属材料构成的阻挡涂布形成 ，以及形成在该阻挡涂层的铂涂层。

公开(公告)号：EP0922667B1

公开(公告)日：2004-08-25

申请号：EP98924654.1

申请日：1998-06-12

申请人： FUJIKIN Inc. ,  Ohmi, Tadahiro

发明人： OHMI, Tadahiro ,  MINAMI, Yukio ,  KAWADA, Koji ,  TANABE, Yoshikazu ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro

IPC分类号： C01B5/00

CPC分类号： C01B5/00

摘要： A method of generating water for use in semiconductor production which comprises feeding hydrogen and oxygen into a reactor body whose inner wall surface has a platinum coating to heighten the reactivity of the hydrogen and oxygen by the catalytic action of the platinum and instantaneously react the resultant hydrogen and oxygen with each other at a temperature lower than the ignition temperature of the hydrogen-containing mixed gas to thereby generate water without conducting high-temperature combustion, wherein the amount of unreacted hydrogen remaining in the generated water when the reactor for water generation is started and stopped is reduced to thereby enhance the safety of the apparatus for semiconductor production and prevent the inhibition of, e.g., silicon oxide film deposition by the water oxidation method. Specifically, in generating water by feeding hydrogen and oxygen into a reactor body whose inner wall surface has a platinum coating, the feeding of oxygen is initiated first and hydrogen feeding is initiated slightly thereafter. In stopping the water generation by stopping the feeding of hydrogen and oxygen into the reactor body, the feeding of hydrogen is stopped first and oxygen feeding is stopped slightly thereafter.

公开(公告)号：EP1707858A1

公开(公告)日：2006-10-04

申请号：EP05703504.0

申请日：2005-01-13

申请人： FUJIKIN INCORPORATED ,  OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  MINAMI, Yukio ,  TUBOTA, Kenji ,  SHINOHARA, Tsutomu ,  YAMAJI, Michio ,  IKEDA, Nobukazu ,  MORIMOTO, Akihiro ,  KAWADA, Koji ,  NARIAI, Toshiro

IPC分类号： F16K51/00

CPC分类号： F16K51/02 ,  Y10T137/6606 ,  Y10T137/7043 ,  Y10T137/7062

摘要： Summary
The present invention provides a vacuum thermal insulating valve that may be used at high temperature in gas supply systems or gas exhaust systems, and also may be made substantially small and compact in size owing to its excellent thermal insulating performance.
With a vacuum thermal insulating valve comprising a valve equipped with a valve body and an actuator, and a vacuum thermal insulating box that houses the valve, the afore-mentioned vacuum thermal insulating box S is formed by a square-shaped lower vacuum jacket S 5 having a cylinder-shaped vacuum thermal insulating pipe receiving part J on a side and with its upper face made open, and the square-shaped upper vacuum jackets S 4 , which is hermetically fitted to the lower vacuum jacket S 5 and with its lower face made open.

摘要翻译： 发明内容本发明提供一种真空热绝缘阀，其可以在气体供应系统或排气系统中在高温下使用，并且由于其优异的绝热性能，其尺寸可以做得基本上小而紧凑。 上述真空保温箱S由具有配备有阀体和致动器的阀以及容纳该阀的真空保温箱的真空保温箱S由方形的下部真空保护套S5形成， 一侧为圆柱形的真空保温管接收部分J，其上表面敞开;以及方形的上部真空套S4，其密封地装配在下部真空套S5上并且其下表面敞开。