公开(公告)号：EP0482946A1

公开(公告)日：1992-04-29

申请号：EP91309888.5

申请日：1991-10-25

申请人： FUJITSU LIMITED

发明人： Shiraishi, Atsushi, c/o Fujitsu Limited ,  Asano, Koji, c/o Fujitsu Limited ,  Gotoh, Makoto, c/o Fujitsu Limited ,  Oka, Kotaro, c/o Fujitsu Limited

IPC分类号： C30B7/00 ,  C30B29/58 ,  C30B30/08

CPC分类号： C30B30/08 ,  C30B7/00 ,  C30B29/58 ,  Y10S117/901 ,  Y10T117/1004 ,  Y10T117/1012

摘要： A material processing apparatus comprises a plurality of syringes (1) provided detachable on a base member (26) and containing fluids (2, 3) that are used for processing a material, a processing chamber (4) provided detachable on the base member for causing the material processing, an actuation mechanism (31 - 33) for actuating the plurality of syringes to supply the fluids in the syringes to the processing chamber; and an interconnection fixture (50) for connecting the plurality of syringes to the processing chamber for transporting the fluids in the plurality of syringes to the processing chamber, wherein the plurality of syringes are provided detachable with respect to the interconnection fixture, and wherein the processing chamber is provided detachable with respect to the interconnection fixture.

摘要翻译： 一种材料处理设备包括多个注射器（1），其可拆卸地安装在基底部件（26）上并且包含用于处理材料的流体（2,3）;处理室（4），其可拆卸地设置在基座部件上 引起所述材料处理，致动机构（31-33）用于致动所述多个注射器以将所述注射器中的流体供应到所述处理室; 以及用于将所述多个注射器连接到所述处理室以将所述多个注射器中的流体输送到所述处理室的互连夹具（50），其中所述多个注射器相对于所述互连夹具可拆卸地设置，并且其中所述处理 腔室相对于互连夹具可拆卸地设置。

公开(公告)号：EP0482946B1

公开(公告)日：1994-12-21

申请号：EP91309888.5

申请日：1991-10-25

申请人： FUJITSU LIMITED

发明人： Shiraishi, Atsushi, c/o Fujitsu Limited ,  Asano, Koji, c/o Fujitsu Limited ,  Gotoh, Makoto, c/o Fujitsu Limited ,  Oka, Kotaro, c/o Fujitsu Limited

IPC分类号： C30B7/00 ,  C30B29/58 ,  C30B30/08

CPC分类号： C30B30/08 ,  C30B7/00 ,  C30B29/58 ,  Y10S117/901 ,  Y10T117/1004 ,  Y10T117/1012

摘要： A material processing apparatus comprises a plurality of syringes (1) provided detachable on a base member (26) and containing fluids (2, 3) that are used for processing a material, a processing chamber (4) provided detachable on the base member for causing the material processing, an actuation mechanism (31 - 33) for actuating the plurality of syringes to supply the fluids in the syringes to the processing chamber; and an interconnection fixture (50) for connecting the plurality of syringes to the processing chamber for transporting the fluids in the plurality of syringes to the processing chamber, wherein the plurality of syringes are provided detachable with respect to the interconnection fixture, and wherein the processing chamber is provided detachable with respect to the interconnection fixture.