摘要:
An optical system for detecting the shape of a three-dimensional object (50) comprising a collimate lens (23) for converting a laser beam to a parallel beam of light, a scanning optical system (25, 27) which moves the parallel beam incident on the object (50) normal to the latter to scan the object with the scanning beam, a mirror (29) which is located in the vicinity of the scanning beam at a predetermined inclination angle with respect to the object (50), to reflect the beam reflected by the object in a predetermined direction, an image forming lens (33) which converges the reflection beam reflected from the object by the mirror (29) onto a point through the scanning optical system to make an image of the reflection beam, and a first optical dectector (35) located on the point at which the reflection beam is converged to detect the converged beam spot by the image forming lens (33).
摘要:
An optical system for detecting the shape of a three-dimensional object (50) comprising a collimate lens (23) for converting a laser beam to a parallel beam of light, a scanning optical system (25, 27) which moves the parallel beam incident on the object (50) normal to the latter to scan the object with the scanning beam, a mirror (29) which is located in the vicinity of the scanning beam at a predetermined inclination angle with respect to the object (50), to reflect the beam reflected by the object in a predetermined direction, an image forming lens (33) which converges the reflection beam reflected from the object by the mirror (29) onto a point through the scanning optical system to make an image of the reflection beam, and a first optical dectector (35) located on the point at which the reflection beam is converged to detect the converged beam spot by the image forming lens (33).