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    OPTICAL WAVEGUIDE CIRCUIT
    2.
    发明公开
    OPTICAL WAVEGUIDE CIRCUIT 审中-公开
    OPTISCHER WELLENLEITERSCHALTKREIS

    公开(公告)号：EP1191362A4

    公开(公告)日：2005-07-06

    申请号：EP00925585

    申请日：2000-05-10

    申请人： FURUKAWA ELECTRIC CO LTD

    发明人： NARA KAZUTAKA ,  NAKAJIMA TAKESHI ,  KASHIHARA KAZUHISA

    IPC分类号： G02B6/12 ,  G02B6/10 ,  G02B6/126 ,  G02B6/132 ,  G02B6/293 ,  G02B6/34

    CPC分类号： G02B6/126 ,  G02B6/105 ,  G02B6/12023 ,  G02B6/1203 ,  G02B6/132

    摘要： An optical waveguide circuit such as an array waveguide diffraction grating in which the influence of polarization-dependent loss can be suppressed without providing a half-wave plate. A lower clad is formed on a silicon wafer (11). A core having the following waveguide constitution is formed thereon. An input-side slab waveguide (13) is connected to the output side of a plurality of incidence waveguides (12), and a plurality of array waveguides (14) having different lengths are connected side by side to the output side. An output-side slab waveguide (15) is connected to the output side thereof, and a plurality of output waveguides (16) is connected to the output side. The core is clad with upper clad. A plurality of multiplex-inputted incident light beams having different wavelengths are separated for every wavelength and outputted. The clad and the core are made of silica glass. The absolute value |B| of double refraction caused in the optical waveguide circuit is |B| . The relationship between the coefficient of thermal expansion alpha g of the upper clad and the coefficient of thermal expansion alpha s of the silicon wafer is expressed by alpha s-2.0 x 10 .

    摘要翻译： 本发明涉及一种阵列波导光栅等光波导电路，其能够在不设置半波片的情况下抑制极化依赖性损失的影响。 在硅衬底上形成下包层。 在其上形成具有以下波导结构的芯。 也就是说，输入侧平板波导连接到多个入射波导的发射侧，彼此不同长度的多个阵列波导并置并连接到发射侧，输出侧平板波导进一步 连接到其发射侧，并且多个发射波导连接到其发射侧，从而引起上述波导结构。 上部包层覆盖芯。 被入射到芯体中的具有彼此不同波长的多个多路复用和输入光束被波长分离并输出。 包层和芯由二氧化硅基玻璃制成，其中在所述光波导部分中出现的双折射值B为| B | <= 5.34×10-5，而α≤2.0×10-7 <= alphag <= alphas + 2.0 建立了x10-7，假定上包层的热膨胀系数为alphag，硅衬底的热膨胀系数为α。

    ARRAY WAVEGUIDE DIFFRACTION GRATING
    4.
    发明公开
    ARRAY WAVEGUIDE DIFFRACTION GRATING 审中-公开
    波导衍射ARRAY

    公开(公告)号：EP1136852A9

    公开(公告)日：2001-11-28

    申请号：EP00951897

    申请日：2000-08-08

    申请人： FURUKAWA ELECTRIC CO LTD

    发明人： NARA KAZUTAKA ,  KASHIHARA KAZUHISA

    IPC分类号： G02B6/132 ,  G02B6/136 ,  G02B6/34 ,  G02B6/12 ,  G02B6/293

    CPC分类号： G02B6/12011 ,  G02B6/132 ,  G02B6/136

    摘要： The cross talk in the arrayed waveguide grating of the invention can be suppressed. Optical waveguide part (10) comprised of a core and a cladding is formed on silicon substrate (11), and the core forms the following waveguide composition. That is, first slab waveguide (13) is connected to the exit side of a plurality of optical input waveguides (12), and a plurality of arrayed waveguides (14) with varying lengths are disposed in parallel and connected to the exit side of the first slab waveguide. Second slab waveguide (15) is connected to the exit sides of the arrayed waveguides (14), and a plurality of optical output waveguides (16) are connected to the exit side of the second slab waveguide. A plurality of multiplex-inputted light beams with varying wavelengths which are made incident onto the optical input waveguides (12) are separated by each wavelength and outputted. The core is formed by means of flame hydrolysis deposition, and the number of deposited layers of the core is set to 13 or more. By suppressing the standard deviation of the amount of fluctuation in the refractive index of the core comprising the plurality of arrayed waveguides to 4.84x10
    -6 or less, the standard deviation of the phase error distribution of the arrayed waveguides (14) is suppressed to 0.6rad or less to suppress the eross talk to 40dB or less.