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    PLANARIZATION OF OVERCOAT LAYER ON SLANTED SURFACE- RELIEF STRUCTURES
    4.
    发明公开
    PLANARIZATION OF OVERCOAT LAYER ON SLANTED SURFACE- RELIEF STRUCTURES 审中-公开

    公开(公告)号：EP3971633A1

    公开(公告)日：2022-03-23

    申请号：EP21203040.7

    申请日：2019-12-20

    申请人： Facebook Technologies, LLC

    发明人： MOHANTY, Nihar Ranjan

    IPC分类号： G02B27/01 ,  B29D11/00 ,  G02B5/18

    摘要： Techniques for producing an overcoat layer on slanted surface-relief structures and devices obtained using the techniques are disclosed. In some embodiments, a method of planarizing an overcoat layer over a surface-relief structure includes removing a portion of the overcoat layer using an ion beam at a glancing angle. The overcoat layer includes planar surface portions and non-planar surface portions. Each of the non-planar surface portions includes a first sloped side and a second sloped side facing the first sloped side. The glancing angle is selected such that the first sloped side of each non-planar surface portion is shadowed from the ion beam by an adjacent planar surface portion such that the ion beam does not reach at least the first sloped side of each non-planar surface portion but reaches the second sloped side of each non- planar surface portion.

    PLANARIZATION OF OVERCOAT LAYER ON SLANTED SURFACE- RELIEF STRUCTURES
    6.
    发明公开
    PLANARIZATION OF OVERCOAT LAYER ON SLANTED SURFACE- RELIEF STRUCTURES 审中-公开

    公开(公告)号：EP3971634A1

    公开(公告)日：2022-03-23

    申请号：EP21203041.5

    申请日：2019-12-20

    申请人： Facebook Technologies, LLC

    发明人： MOHANTY, Nihar Ranjan

    IPC分类号： G02B27/01 ,  B29D11/00 ,  G02B5/18

    摘要： Techniques for producing an overcoat layer on slanted surface-relief structures and devices obtained using the techniques are disclosed. In some embodiments, a method of planarizing an overcoat layer over a surface-relief structure includes removing a portion of the overcoat layer using an ion beam at a glancing angle. The overcoat layer includes planar surface portions and non-planar surface portions. Each of the non-planar surface portions includes a first sloped side and a second sloped side facing the first sloped side. The glancing angle is selected such that the first sloped side of each non-planar surface portion is shadowed from the ion beam by an adjacent planar surface portion such that the ion beam does not reach at least the first sloped side of each non-planar surface portion but reaches the second sloped side of each non- planar surface portion.