SEMICONDUCTOR DEVICE
    6.
    发明公开

    公开(公告)号:EP3712959A1

    公开(公告)日:2020-09-23

    申请号:EP18878104.1

    申请日:2018-11-15

    申请人: Flosfia Inc.

    摘要: A semiconductor apparatus capable of reducing the leakage current in the reverse direction, and keeping characteristics thereof, even when using n type semiconductor (gallium oxide, for example) or the like having a low-loss at a high voltage and having much higher dielectric breakdown electric field strength than SiC is provided. A semiconductor apparatus includes a crystalline oxide semiconductor having a corundum structure as a main component, and an electric field shield layer and a gate electrode that are respectively laminated directly or through other layers on the n type semiconductor layer, wherein the electric field shield layer includes a p type oxide semiconductor, and is embedded in the n type semiconductor layer deeper than the gate electrode.