VORRICHTUNG UND VERFAHREN ZUR ELEKTROMECHANISCHEN POSITIONIERUNG

    公开(公告)号:EP2409164A1

    公开(公告)日:2012-01-25

    申请号:EP10716743.9

    申请日:2010-03-06

    IPC分类号: G01Q10/04 B23Q1/34 H01L41/09

    CPC分类号: G01Q10/04 B82Y35/00 H02N2/025

    摘要: The invention relates to an apparatus having at least one tubular piezo element for the electromechanical positioning of a rotor on the inside of the piezo element. Said apparatus is characterized by at least one elastic friction means for applying a normal force onto the rotor, said friction means being connected to the piezo element. A method for controlling the apparatus is disclosed.

    摘要翻译: 本发明涉及一种具有至少一个管状压电元件的设备,用于在压电元件的内侧机电定位转子。 所述设备的特征在于至少一个弹性摩擦装置,用于将正向力施加到转子上,所述摩擦装置连接到压电元件。 公开了一种用于控制该设备的方法。

    NANOPOSITIONIERER
    4.
    发明公开

    公开(公告)号:EP2510560A1

    公开(公告)日:2012-10-17

    申请号:EP10798483.3

    申请日:2010-11-10

    IPC分类号: H01L41/09 G01Q10/04

    CPC分类号: H02N2/006 H02N2/025 H02N2/028

    摘要: The invention relates to a nanopositioner. Said nanopositioner comprises at least one actuator with at least one support for the object to be moved, said support being movable by the deflection of the actuator, and a spring element which may impinge a normal force acting between the object and the support upon the object to be moved. According to the invention, the spring element is connected to the support in such a way that the tensile state of the spring element is independent from the position of the object to be moved. Based on this measure and independent from the concrete position of the object, a purely normal force is exerted between object and support. No lateral force is exerted which would act against the movement of the object by the actuator and thus would restrict it or make it non-reproductible. This is particularly important for slip-stick drives in which the object is always alternately in static and sliding friction relative to the support. The friction conditions are here significantly determined by the normal force which is exerted in a defined manner according to the invention.