Mold structure, imprinting method using the same, magnetic recording medium and production method thereof
    2.
    发明公开
    Mold structure, imprinting method using the same, magnetic recording medium and production method thereof 审中-公开
    Formstruktur,Druckverfahren damit,magnetisches Aufzeichnungsmedium und Herstellungsverfahrendafür

    公开(公告)号:EP1975704A2

    公开(公告)日:2008-10-01

    申请号:EP08153536.1

    申请日:2008-03-28

    IPC分类号: G03F7/00

    摘要: The present invention provides a mold structure including: a concavo-convex pattern formed on its surface, wherein the mold structure is used for transferring the concavo-convex pattern onto an imprint resist layer formed on a surface of a substrate having a thickness of 0.3mm to 2.0mm by placing the concavo-convex pattern against the imprint resist layer, and wherein a thickness Dm (mm) of the mold structure, a thickness Ds (mm) of the substrate and a curl amount C (mm) of the mold structure satisfy the relationship 0.01≤10,000×(Dm 3 /Ds 3 ) 1/2 ×C 2 ≤250.

    摘要翻译: 本发明提供一种模具结构,其包括:在其表面上形成的凹凸图案,其中所述模具结构用于将所述凹凸图案转印到形成在厚度为0.3mm的基板的表面上的压印抗蚀剂层上 通过将凹凸图案放置在耐压印层上,并且其中模具结构的厚度Dm(mm),基板的厚度Ds(mm)和模具结构的卷曲量C(mm) 满足0.01‰¤10,000×(Dm 3 / Ds 3)1/2×C 2‰¤250。