公开(公告)号：EP2028577A2

公开(公告)日：2009-02-25

申请号：EP08006286.2

申请日：2000-04-03

申请人： Fujikin Incorporated ,  TOKYO ELECTRON LIMITED ,  Ohmi, Tadahiro

发明人： Ohmi, Tadahiro ,  Kagatsume, Satoshi ,  Sugiyama, Kazuhiko ,  Minami, Yukio ,  Nishino, Kouji ,  Dohi, Ryousuke ,  Yonehana, Katsunori ,  Ikeda, Nobukazu ,  Yamaji, Michio ,  Hirose, Jun ,  Fukazawa, Kazuo ,  Koizumi, Hiroshi ,  Nagaoka, Hideki ,  Morimoto, Akihiro ,  Uno, Tomio ,  Ideta, Eiji ,  Matsumoto, Atsushi ,  Uenoyama, Toyomi ,  Hirose, Takashi

IPC分类号： G05D7/06

CPC分类号： G05D7/0658 ,  G05D7/0664 ,  Y10S438/935 ,  Y10T137/0396 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/86389 ,  Y10T137/87877 ,  Y10T137/87917

摘要： A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages, For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.
Also provided are a method and an apparatus for the above in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system. To that end, a formula for calculating the flow rate of a gas is theoretically derived that flows with a pressure ratio not higher than the critical pressure ratio. From that formula, the flow factor is defined, so that the formula may be applied to a number of gas types using flow factors

摘要翻译： 用的流线从一个调节器，用于压力调整分支出来的多个流体供给装置中，流线平行地布置，worin的量度取，DASS模具手术，也就是，开口或一个流路的开闭将没有 在其它流动通道的稳流瞬态效应，为了这个目的，每个流动通道设置有一个时间延迟型质量流量控制器MFC所以没有当一个封闭流体通道打开时，质量流量控制器上没有流动通道河段 一组流量Qs在从起点的特定延迟时间“t。 这样提供了一种方法和用于其中的气体类型的多元性可与精度高流速通过一个压力式流量控制装置来控制上述装置的速率。为了做到端，用于计算气体的流动的公式 理论上推导做了与压力比不低于临界压力比更高流动。 从做过公式，则流程因数被定义，所以没式可使用流动因素来应用于多种气体类型