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1.发明公开Parallel bypass type fluid feeding device, and method and device for controlling fluid variable type pressure system flow rate used for the device 审中-公开有用于控制用于液体压力系统的可变流量平行旁路和方法和装置的液体供给装置
公开(公告)号：EP2028577A2
公开(公告)日：2009-02-25
申请号：EP08006286.2
申请日：2000-04-03
发明人： Ohmi, Tadahiro , Kagatsume, Satoshi , Sugiyama, Kazuhiko , Minami, Yukio , Nishino, Kouji , Dohi, Ryousuke , Yonehana, Katsunori , Ikeda, Nobukazu , Yamaji, Michio , Hirose, Jun , Fukazawa, Kazuo , Koizumi, Hiroshi , Nagaoka, Hideki , Morimoto, Akihiro , Uno, Tomio , Ideta, Eiji , Matsumoto, Atsushi , Uenoyama, Toyomi , Hirose, Takashi
IPC分类号： G05D7/06
CPC分类号： G05D7/0658 , G05D7/0664 , Y10S438/935 , Y10T137/0396 , Y10T137/7759 , Y10T137/7761 , Y10T137/86389 , Y10T137/87877 , Y10T137/87917
摘要： A fluid supply apparatus with a plurality of flow lines branching out from one regulator for adjustment of pressure, the flow lines being arranged in parallel, wherein a measure is taken that the operation, that is, opening or closing of one flow passage will have no transient effect on the steady flow of the other flow passages, For this purpose, each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time Δt from the starting point.
Also provided are a method and an apparatus for the above in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system. To that end, a formula for calculating the flow rate of a gas is theoretically derived that flows with a pressure ratio not higher than the critical pressure ratio. From that formula, the flow factor is defined, so that the formula may be applied to a number of gas types using flow factors摘要翻译： 用的流线从一个调节器，用于压力调整分支出来的多个流体供给装置中，流线平行地布置，worin的量度取，DASS模具手术，也就是，开口或一个流路的开闭将没有 在其它流动通道的稳流瞬态效应，为了这个目的，每个流动通道设置有一个时间延迟型质量流量控制器MFC所以没有当一个封闭流体通道打开时，质量流量控制器上没有流动通道河段 一组流量Qs在从起点的特定延迟时间“t。 这样提供了一种方法和用于其中的气体类型的多元性可与精度高流速通过一个压力式流量控制装置来控制上述装置的速率。为了做到端，用于计算气体的流动的公式 理论上推导做了与压力比不低于临界压力比更高流动。 从做过公式，则流程因数被定义，所以没式可使用流动因素来应用于多种气体类型
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公开(公告)号：EP0859155A2
公开(公告)日：1998-08-19
申请号：EP98102554.7
申请日：1998-02-13
发明人： Ohmi, Tadahiro , Morokoshi, Hiroshi , Yamaji, Michio , Tanaka, Shigeaki , Hirao, Keiji , Kawano, Yuki , Hirose, Takashi , Yokoyama, Kosuke , Kuramochi, Michio , Hatano, Masayuki , Ikeda, Nobukazu
IPC分类号： F15B1/00
CPC分类号： F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F15B2013/006 , Y10T137/87249 , Y10T137/87265 , Y10T137/87885
摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
摘要翻译： 设置在流体控制器的每个入口和出口处的开关装置是五种开关装置中的一种，即具有双端口阀的开关装置，开关装置具有二通阀， 三通阀和三通阀，具有双口阀和两个三通阀的开关装置，具有两个三通阀的开关装置和具有三个三通阀的开关装置。 所有类型的开关装置的双口阀的主体构造相同，并且在其底面具有入口和出口。 所有类型的开 - 关装置的三通阀的主体具有相同的结构，并且在其底面中形成有入口，始终与入口连通的出口和入口 - 出口开口。
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3.发明公开Method of fixing a plurality of lower members each having a reference bore for installing an upper member, and fixing jigs 审中-公开一种用于安装多个下部元件，每个具有用于安装一个上部元件和附接装置的一个基准孔方法
公开(公告)号：EP1384925A3
公开(公告)日：2004-02-18
申请号：EP03024656.5
申请日：1998-10-13
IPC分类号： H01L21/00
CPC分类号： F16K27/003 , Y10T29/49895 , Y10T29/49899 , Y10T29/49902 , Y10T29/53913 , Y10T29/53978
摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.
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4.发明公开Method of fixing a plurality of lower members each having a reference bore for installing an upper member, and fixing jigs 审中-公开一种用于安装多个下部元件，每个具有用于安装一个上部元件和附接装置的一个基准孔方法
公开(公告)号：EP1384925A2
公开(公告)日：2004-01-28
申请号：EP03024656.5
申请日：1998-10-13
CPC分类号： F16K27/003 , Y10T29/49895 , Y10T29/49899 , Y10T29/49902 , Y10T29/53913 , Y10T29/53978
摘要： First and second two spacing jigs 81 are used each having a rectangular parallelepipedal body 81a formed on the bottom surface thereof with projections 82 which are arranged side by side at a spacing equal to a predetermined interval between reference bores 106. First, the projections 82 of the first jig 81 are fitted in front reference bores 106 of respective lower members 31, 32, 33, and the projections 82 of the second jig 82 in rear reference bores 106 of the lower members. A right angle holding jig 84 in the form of a rectangular frame and having inner side faces positionable respectively in contact with the front side face of the first jig 81, the rear side face of the second jig 81 and the left and right side faces of the two jigs 81 is fitted around the bodies 81a of the two jigs 81 to adjust the arrangement of bores 106 to right angles. The lower members are fixed to a support member in this state by tightening up screw members 110.
摘要翻译： 第一和第二两个限位夹具81被用于各具有长方体体81A与并排在等于106首先，82突起参考孔之间具有预定间隔的间距排列侧突起82形成在其底表面上 第一夹具81被装配在前面参考孔respectivement下部构件31，32，33的106，并且突出在后方参照第二夹具82的孔82的下构件106。 直角保持夹具84为矩形框架的形式，并且具有内侧面定位的分别与所述第一夹具81的前侧面相接触，该第二夹具81的后侧面和左右侧面 的两个夹具81被嵌合在两个夹具81的本体81a至腔106的配置调整为直角。 下部构件通过收紧螺丝部件110
固定到在该状态下的支撑部件 -
公开(公告)号：EP0756118A3
公开(公告)日：1997-02-05
申请号：EP96302056.5
申请日：1996-03-26
CPC分类号： C23C16/45561 , B01J4/008 , C30B25/14 , C30B31/16 , F16K31/1226 , F16K31/42 , Y10T137/87684
摘要： A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L 1 , L 2 , ...) for feeding plural types of fluid (G 1 , G 2 ,...) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L 1 , L 2 ,...) for switching the fluids (G 1 , G 2 ,...) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
摘要翻译： 流体控制系统及其阀组件用于精确控制流体的供给（通过快速准确地操作（打开和关闭）阀门），用于制造半导体，磁性薄膜，生物技术产品和其他产品。 流体控制系统包括主控制线（L）和用于将多种类型的流体（G1，G2，...）供给到处理装置（C）中的多个分支控制线（L1，L2，...） 主控制管路和多个阀组件（V），所述多个阀组件（V）结合在用于切换供给到处理装置（C）中的流体（G1，G2，...）的分支控制管路（L1，L2，...）中。 每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和电磁阀（V“），电磁阀（V”）在单个外壳中基本上没有软管地连接到流体驱动阀 （V'）以将工作流体（A）供给到流体压力致动器（1）中。
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公开(公告)号：EP0751301B1
公开(公告)日：2003-03-05
申请号：EP96110514.5
申请日：1996-06-28
发明人： Ohmi, Tadahiro , Hirao, Keiji , Yamaji, Michio , Itoi, Shigeru , Shinohara, Tsutomu , Ikeda, Nobukazu , Kojima, Tetsuya
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
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公开(公告)号：EP0859155A3
公开(公告)日：1999-07-28
申请号：EP98102554.7
申请日：1998-02-13
发明人： Ohmi, Tadahiro , Morokoshi, Hiroshi , Yamaji, Michio , Tanaka, Shigeaki , Hirao, Keiji , Kawano, Yuki , Hirose, Takashi , Yokoyama, Kosuke , Kuramochi, Michio , Hatano, Masayuki , Ikeda, Nobukazu
IPC分类号： F15B1/00
CPC分类号： F15B13/0817 , F15B13/0871 , F15B13/0892 , F15B13/0896 , F15B2013/006 , Y10T137/87249 , Y10T137/87265 , Y10T137/87885
摘要： An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port valves, on-off device having two three-port valves, and on-off device having three three-port valves, The main bodies of two-port valves of all types of on-off devices are identical in configuration and each have an inlet and an outlet in a bottom face thereof. Main bodies of three-port valves of all types of on-off devices are identical in configuration and each formed in a bottom face thereof with an inlet, an outlet always in communication with the inlet, and an inlet-outlet subopening.
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公开(公告)号：EP0877170A1
公开(公告)日：1998-11-11
申请号：EP98108114.4
申请日：1998-05-05
发明人： Ohmi, Tadahiro , Yamaji, Michio , Shinohara, Tsutomu , Itoi, Shigeru , Hirao, Keiji , Kawano, Yuji , Tanaka, Shigeaki , Yokoyama, Kosuke , Morokoshi, Hiroshi , Ikeda, Nobukazu
CPC分类号： F16K27/003 , F16L39/00
摘要： A coupling (104,80) comprises a holding member (40) having a U-shaped cross section, and a channel member (41,101) held by the holding member. The holding member (40) has an upper wall (81) formed with screw bores (84) for use in attaching the holding member to a fluid controller. The channel member (41,101) comprises a body having an inner channel and fitted in a space between the upper wall of the holding member and a lower wall thereof, a tubular upward projection (92) communicating with the inner channel of the body and having an upper end (92) inserted in a through bore (85) in the upper wall (81) of the holding member (41,101) to communicate with a downward channel of the fluid controller, and a tubular lateral projection (94) communicating with the inner channel of the body and extending laterally. The upper end of the channel member has an outward flange (93), and the through bore of the upper wall of the holding member has an inward flange (85a) for supporting the flange.
摘要翻译： 联轴器（104,80）包括具有U形横截面的保持构件（40）和由保持构件保持的通道构件（41,101）。 保持构件（40）具有形成有用于将保持构件附接到流体控制器的螺钉孔（84）的上壁（81）。 通道构件（41,101）包括具有内部通道并装配在保持构件的上壁和其下壁之间的空间中的主体，与主体的内部通道连通的管状向上突起（92），并且具有 插入在保持构件（41,101）的上壁（81）中的通孔（85）中的上端（92）与流体控制器的向下通道连通，以及与内部连通的管状横向突起（94） 身体通道并横向延伸。 通道构件的上端具有向外的凸缘（93），并且保持构件的上壁的通孔具有用于支撑凸缘的向内凸缘（85a）。
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公开(公告)号：EP0756118A2
公开(公告)日：1997-01-29
申请号：EP96302056.5
申请日：1996-03-26
CPC分类号： C23C16/45561 , B01J4/008 , C30B25/14 , C30B31/16 , F16K31/1226 , F16K31/42 , Y10T137/87684
摘要： A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L 1 , L 2 , ...) for feeding plural types of fluid (G 1 , G 2 ,...) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L 1 , L 2 ,...) for switching the fluids (G 1 , G 2 ,...) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).
摘要翻译： 流体控制系统及其阀门组件用于精确地控制流体的供给（通过快速准确地操作（打开和关闭）阀），用于制造半导体，磁性薄膜，生物技术产品和其他产品。 流体控制系统包括主控制线（L）和多个分支控制线（L1，L2，...），用于将多种类型的流体（G1，G2，...）馈送到耦合到 主控制线和并入用于切换供给到处理装置（C）中的流体（G1，G2，...）的分支控制线路（L1，L2，...）中的多个阀组件（V）。 每个阀组件（V）包括具有流体压力致动器（1）的流体驱动阀（V'）和在基本上没有软管的单个壳体中一体地附接到流体驱动阀的电磁阀（V“） （V'）以将工作流体（A）进料到流体压力致动器（1）中
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公开(公告)号：EP0751301A2
公开(公告)日：1997-01-02
申请号：EP96110514.5
申请日：1996-06-28
发明人： Ohmi, Tadahiro , Hirao, Keiji , Yamaji, Michio , Itoi, Shigeru , Shinohara, Tsutomu , Ikeda, Nobukazu , Kojima, Tetsuya
CPC分类号： F15B13/0832 , F15B13/0817 , F15B13/0871 , Y10T137/5109 , Y10T137/5283 , Y10T137/87885
摘要： A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outlet side, a vent on-off valve is positioned on a vacuum suction on-off valve, with a main passage on-off valve further positioned on the vent on-off valve.
摘要翻译： 流体控制装置包括质量流量控制器，设置在控制器入口侧的两个开关阀和设置在控制器出口侧的三个开关阀。 在入口侧，主流体开关阀位于净化流体开关阀上，并且在出口侧，排气开关阀位于真空吸入开关阀上，主通道 开关阀进一步定位在通气开关阀上。
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