专利检索 ap:("Fujitsu Semiconductor Limited") AND inv:"Haseyama, Makoto c/o Fuijtsu Limited" 第 1 页

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发明授权
Contactor for semiconductor devices, a testing apparatus using such contactor, a testing method using such contactor, and a method of cleaning such contactor 有权
标题翻译：接触器用于半导体器件，在这样的接触器的检测装置，使用这种接触器和纯化方法用于这种接触器测试

公开(公告)号：EP1011134B1

公开(公告)日：2013-01-23

申请号：EP99306225.6

申请日：1999-08-05

申请人： Fujitsu Semiconductor Limited

发明人： Maruyama, Shigeyuki, c/o Fujitsu Limited , Fukaya, Futoshi c/o Fujitsu Limited , Haseyama, Makoto c/o Fuijtsu Limited

IPC分类号： G01R31/28 , H01L21/683

CPC分类号： H01L21/6838 , G01R1/07314 , G01R31/2831 , G01R31/2886 , H01L21/67126 , H01L21/68735 , H01L21/68785