摘要:
A piezoelectric scanner (1) comprises four piezoelectric elements (4a to 4d) bonded in base member (2) and attached via respective couplings (6a to 6d) to a member (7) to be scanned. Each piezoelectric element (6a to 6d) comprises two layers of piezoelectric material arranged in opposite sense such that when a voltage is applied across the material it is caused to bend. The four elements (4a to 4d) are connected such that an applied voltage either causes all the elements to bend inwards or to cause all the elements to bend outwards. The couplings (6a and 6d) are mounted lower on the member (7) than coupling (6b) and (6c) such that applying a voltage to the elements (6a to 6d) cause the member (7) to rotate. The centre of gravity of the member (7) lies on the axis of rotation and therefore the scanner is less susceptible to external vibration than previous designs. The invention also provides a method by which such a scanner can be commercially manufactured.
摘要:
A piezoelectric scanner (1) comprises four piezoelectric elements (4a to 4d) bonded in base member (2) and attached via respective couplings (6a to 6d) to a member (7) to be scanned. Each piezoelectric element (6a to 6d) comprises two layers of piezoelectric material arranged in opposite sense such that when a voltage is applied across the material it is caused to bend. The four elements (4a to 4d) are connected such that an applied voltage either causes all the elements to bend inwards or to cause all the elements to bend outwards. The couplings (6a and 6d) are mounted lower on the member (7) than coupling (6b) and (6c) such that applying a voltage to the elements (6a to 6d) cause the member (7) to rotate. The centre of gravity of the member (7) lies on the axis of rotation and therefore the scanner is less susceptible to external vibration than previous designs. The invention also provides a method by which such a scanner can be commercially manufactured.
摘要:
The relative position (M) of two members (33, 34) is sensed by scanning (S) an optical beam (25) over an encoded pattern (20) carried by one of the members, and by using a read head (21) secured to the other member to receive an optical signal transmitted from the encoded pattern (20). This optical signal is received by an optical position sensor to discriminate from the frequency of the signal, the position of the read head (21) relative to the encoded pattern (20). As the relative position is detected from the frequency of the signal rather than its intensity, components can be replaced without recalibration. The optical beam (25) is scanned by using a light source of variable wavelength which is passed through a device, such as a diffraction grating or a gradient index lens, for deflecting the beam (25) dependent on its wavelength.