Piezoelectric scanner
    1.
    发明公开
    Piezoelectric scanner 失效
    Piezoelektrischer扫描仪

    公开(公告)号:EP0827001A3

    公开(公告)日:1998-11-25

    申请号:EP97306138.5

    申请日:1997-08-12

    IPC分类号: G02B7/18 G02B26/10

    CPC分类号: H02N2/10 G02B7/1821 G02B26/10

    摘要: A piezoelectric scanner (1) comprises four piezoelectric elements (4a to 4d) bonded in base member (2) and attached via respective couplings (6a to 6d) to a member (7) to be scanned. Each piezoelectric element (6a to 6d) comprises two layers of piezoelectric material arranged in opposite sense such that when a voltage is applied across the material it is caused to bend. The four elements (4a to 4d) are connected such that an applied voltage either causes all the elements to bend inwards or to cause all the elements to bend outwards. The couplings (6a and 6d) are mounted lower on the member (7) than coupling (6b) and (6c) such that applying a voltage to the elements (6a to 6d) cause the member (7) to rotate. The centre of gravity of the member (7) lies on the axis of rotation and therefore the scanner is less susceptible to external vibration than previous designs. The invention also provides a method by which such a scanner can be commercially manufactured.

    Piezoelectric scanner
    2.
    发明公开
    Piezoelectric scanner 失效
    压电扫描仪

    公开(公告)号:EP0827001A2

    公开(公告)日:1998-03-04

    申请号:EP97306138.5

    申请日:1997-08-12

    IPC分类号: G02B7/18 G02B26/10

    CPC分类号: H02N2/10 G02B7/1821 G02B26/10

    摘要: A piezoelectric scanner (1) comprises four piezoelectric elements (4a to 4d) bonded in base member (2) and attached via respective couplings (6a to 6d) to a member (7) to be scanned. Each piezoelectric element (6a to 6d) comprises two layers of piezoelectric material arranged in opposite sense such that when a voltage is applied across the material it is caused to bend. The four elements (4a to 4d) are connected such that an applied voltage either causes all the elements to bend inwards or to cause all the elements to bend outwards. The couplings (6a and 6d) are mounted lower on the member (7) than coupling (6b) and (6c) such that applying a voltage to the elements (6a to 6d) cause the member (7) to rotate. The centre of gravity of the member (7) lies on the axis of rotation and therefore the scanner is less susceptible to external vibration than previous designs. The invention also provides a method by which such a scanner can be commercially manufactured.

    摘要翻译: 一个压电扫描器(1)包括四个压电元件(4a至4d),它们被接合在基座元件(2)中,并通过各自的耦合器(6a至6d)连接到待扫描的元件(7)上。 每个压电元件(6a至6d)包括以相反方向布置的两层压电材料,使得当在材料上施加电压时使其弯曲。 四个元件(4a至4d)连接成使得所施加的电压或者导致所有元件向内弯曲或者导致所有元件向外弯曲。 联接器(6a和6d)比联接器(6b)和(6c)更低地安装在构件(7)上,使得向元件(6a至6d)施加电压导致构件(7)旋转。 构件(7)的重心位于旋转轴线上,因此扫描器比以前的设计更不容易受到外部振动的影响。 本发明还提供了一种这样的扫描仪可以在商业上制造的方法。

    Apparatus and method for sensing the relative position of two members
    3.
    发明公开
    Apparatus and method for sensing the relative position of two members 失效
    装置和用于测量的两个相互可移动部件的相对位置的方法。

    公开(公告)号:EP0512864A1

    公开(公告)日:1992-11-11

    申请号:EP92304184.2

    申请日:1992-05-08

    IPC分类号: G01D5/38

    CPC分类号: G01D5/38

    摘要: The relative position (M) of two members (33, 34) is sensed by scanning (S) an optical beam (25) over an encoded pattern (20) carried by one of the members, and by using a read head (21) secured to the other member to receive an optical signal transmitted from the encoded pattern (20). This optical signal is received by an optical position sensor to discriminate from the frequency of the signal, the position of the read head (21) relative to the encoded pattern (20). As the relative position is detected from the frequency of the signal rather than its intensity, components can be replaced without recalibration. The optical beam (25) is scanned by using a light source of variable wavelength which is passed through a device, such as a diffraction grating or a gradient index lens, for deflecting the beam (25) dependent on its wavelength.

    摘要翻译: 的相对位置的两个成员(M)(33,34)由扫描(S)到光束(25)在由构件中的一个携带的编码图案(20)感测到,并且通过使用一个读出头(21) 固定到另一构件从所述编码图案(20)在接收光信号的反式mitted。 这个光信号通过在光学位置传感器接收到来自信号的频率来区分,所述读取头的位置(21)相对于所述编码图案(20)。 根据相对位置从信号而不是其强度的频率检测,部件可以无需重新校准来代替。 光束(25)是通过使用可变波长的光源的所有其通过装置时,检查作为衍射光栅或梯度折射率透镜,用于偏转光束(25)依赖于其波长扫描。