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公开(公告)号:EP0320657A1
公开(公告)日:1989-06-21
申请号:EP88119329.6
申请日:1988-11-21
CPC分类号: C23C16/27 , C23C16/0272 , C30B25/00 , C30B29/04
摘要: Boron is used as a diamond crystal nucleation and growth enhancer on a substrate in a CVD process of nucleating and growing diamond crystals on a substrate exposed to an activated hydrogen-hydrocarbon gas mixture.
摘要翻译: 在用于在暴露于活性氢 - 烃气体混合物的基底上成核和生长金刚石晶体的CVD工艺中,硼用作基底上的金刚石晶体成核和生长增强剂。
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公开(公告)号:EP0320657B1
公开(公告)日:1993-09-29
申请号:EP88119329.6
申请日:1988-11-21
CPC分类号: C23C16/27 , C23C16/0272 , C30B25/00 , C30B29/04
摘要: Boron is used as a diamond crystal nucleation and growth enhancer on a substrate in a CVD process of nucleating and growing diamond crystals on a substrate exposed to an activated hydrogen-hydrocarbon gas mixture.
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