-
1.
公开(公告)号:EP4402729A1
公开(公告)日:2024-07-24
申请号:EP21957687.3
申请日:2021-09-17
发明人: YU, Peichen , LIU, Hsuehli , MUKHERJEE, Anupam , WU, Hsinlung , BOONG, Lek Yuan , PANCHAM, Padmanabh Pundrikaksha
CPC分类号: Y02E10/50 , H01L31/0481 , H01L31/048 , B32B7/12 , B32B2457/1220130101 , B32B25/20 , B32B27/306 , B32B15/095 , B32B5/02 , B32B27/34 , B32B25/08 , B32B2307/41220130101 , B32B3/04 , B32B15/06 , B32B25/10 , B32B2274/0020130101 , B32B15/082 , B32B27/32 , B32B2307/737620230501 , B32B2307/306520130101 , B32B2255/2620130101 , B32B2307/30420130101 , B32B2262/10120130101 , B32B27/40 , B32B3/18 , B32B2307/53620130101 , B32B2255/2820130101 , B32B27/365 , B32B2255/1020130101 , B32B2307/582520130101 , B32B27/36 , B32B2307/5420130101 , B32B2255/2020130101 , B32B27/12 , B32B2307/41420130101 , B32B27/283 , B32B27/304 , B32B27/322 , B32B27/08 , B32B17/04 , B32B17/10