Method and apparatus for detecting deformations of leads of semiconductor device
    3.
    发明公开
    Method and apparatus for detecting deformations of leads of semiconductor device 失效
    的方法和装置上的半导体装置的引线检测变形。

    公开(公告)号:EP0472041A2

    公开(公告)日:1992-02-26

    申请号:EP91113130.8

    申请日:1991-08-05

    申请人: HITACHI, LTD.

    IPC分类号: G01N21/88 H05K13/08

    摘要: Method and apparatus for detecting vertical and horizontal deformations of leads (20) of a semiconductor device (11) by illuminating the leads with a planar light beam (14) and determining relative positions (22a, 22b) of the planar light beam on the leads on the basis of distribution of light rays reflected from the leads. Different lead deformations can be detected with one and the same mechanism within a short time. By applying the invention to a semiconductor device mounting apparatus, a single detector can be employed in common both for the detection of the semiconductor device position and the detection of reflections of the planar beam.

    摘要翻译: 通过用平面光束(14)和确定性采矿相对位置照射所述引线检测的半导体器件(11)的引线(20)的垂直和水平变形的方法和设备(22A,22B)上的引线的平面光束的 的光线分布的基础上,从所述引线的反射。 不同导线的变形可以与一个和一个短的时间内相同的机制来检测。 通过应用本发明的半导体器件安装装置中,单个检测器能够共同使用两种用于检测半导体器件的和平面波束的反射的位置检测。

    Component transporting apparatus and method
    4.
    发明公开
    Component transporting apparatus and method 失效
    Vorrichtung und Verfahren zum Transport von Bauteilen。

    公开(公告)号:EP0449481A1

    公开(公告)日:1991-10-02

    申请号:EP91302324.8

    申请日:1991-03-18

    申请人: HITACHI, LTD.

    IPC分类号: H05K13/04

    CPC分类号: H05K13/08 H05K13/0413

    摘要: An apparatus for transporting a component, such as an electronic component (4) has a head (1) with a holding means (3) for holding the component (4) when the component (4) is picked up from a suitable store (15,15a). The head (1) is movable relative to a base (100). An imaging apparatus (6), such as a camera, is fixed to the head (1) and this allows the position of the component (4) relative to the holding means (3) to be determined whilst the component (4) is being transported. In order to simplify the structure, there is a movable optical component (8) on the head (1) which, in one position, contributes to defining an optical path between the component (4) and the imaging apparatus (6), and in another position is withdrawn. A further imaging apparatus may be provided, on the base or on the head. That further imaging apparatus (42,43,45) may then detect the position of large components (4), if the first imaging apparatus has a narrow filed of view for small components (4). Alternatively, when the further imaging apparatus is on the head (1), it may detect the position to which the component (4) is to be transported.

    摘要翻译: 用于运输诸如电子部件(4)的部件的装置具有头部(1),当从适当的商店(15)拾取部件(4)时,头部(1)具有用于保持部件(4)的保持装置(3) ,15A)。 头部(1)可相对于底座(100)移动。 诸如相机的成像装置(6)固定到头部(1),并且这允许在部件(4)正在被保持时确定部件(4)相对于保持装置(3)的位置 运输。 为了简化结构,在头部(1)上存在可移动的光学部件(8),其在一个位置中有助于限定部件(4)和成像设备(6)之间的光路,并且在 另一个立场被撤回。 可以在基座或头部上设置另一成像装置。 如果第一成像装置对于小部件(4)具有窄视野范围,则该另外的成像装置(42,43,45)可以随后检测大部件(4)的位置。 或者,当另外的成像装置在头部(1)上时,它可以检测组件(4)要被运送到的位置。