摘要:
Method and apparatus for detecting vertical and horizontal deformations of leads (20) of a semiconductor device (11) by illuminating the leads with a planar light beam (14) and determining relative positions (22a, 22b) of the planar light beam on the leads on the basis of distribution of light rays reflected from the leads. Different lead deformations can be detected with one and the same mechanism within a short time. By applying the invention to a semiconductor device mounting apparatus, a single detector can be employed in common both for the detection of the semiconductor device position and the detection of reflections of the planar beam.
摘要:
Method and apparatus for detecting vertical and horizontal deformations of leads (20) of a semiconductor device (11) by illuminating the leads with a planar light beam (14) and determining relative positions (22a, 22b) of the planar light beam on the leads on the basis of distribution of light rays reflected from the leads. Different lead deformations can be detected with one and the same mechanism within a short time. By applying the invention to a semiconductor device mounting apparatus, a single detector can be employed in common both for the detection of the semiconductor device position and the detection of reflections of the planar beam.
摘要:
An apparatus for transporting a component, such as an electronic component (4) has a head (1) with a holding means (3) for holding the component (4) when the component (4) is picked up from a suitable store (15,15a). The head (1) is movable relative to a base (100). An imaging apparatus (6), such as a camera, is fixed to the head (1) and this allows the position of the component (4) relative to the holding means (3) to be determined whilst the component (4) is being transported. In order to simplify the structure, there is a movable optical component (8) on the head (1) which, in one position, contributes to defining an optical path between the component (4) and the imaging apparatus (6), and in another position is withdrawn. A further imaging apparatus may be provided, on the base or on the head. That further imaging apparatus (42,43,45) may then detect the position of large components (4), if the first imaging apparatus has a narrow filed of view for small components (4). Alternatively, when the further imaging apparatus is on the head (1), it may detect the position to which the component (4) is to be transported.