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13 条记录 (耗时 0.009 秒)

    Vacuum pump apparatus
    1.
    发明公开
    Vacuum pump apparatus 失效
    真空泵装置

    公开(公告)号：EP0226039A1

    公开(公告)日：1987-06-24

    申请号：EP86115640.4

    申请日：1986-11-11

    申请人： HITACHI, LTD.

    发明人： Nagaoka, Takashi ,  Mase, Masahiro ,  Gyobu, Ichiro ,  Ikemura, Kazuhiko Hitachi Komeiryo

    IPC分类号： F04D19/04 ,  F04D25/16

    CPC分类号： F04D19/046 ,  F04D17/168 ,  F04D23/008 ,  F04D25/16

    摘要： A vacuum pump apparatus of a unitary construction type has a plurality of pump stages of different types arranged in a housing (4) and between suction (2) and discharge ports (3) therein. The apparatus further has a gas passage (17) for introducing a gas having a molecular weight higher than that of the gas sucked through the suction port (2) into a pump stage spaced downstream from the suction port (2) by more than one pump stage. The compression ratio across the pump stage into which the gas of the higher molecular weight is introduced is increased to enable the pump of an upstream stage to operate with a required discharge pressure, whereby a high level of vacuum can be established at the suction port (2) of the vacuum pump apparatus.

    摘要翻译： 单一结构类型的真空泵设备具有布置在壳体（4）中以及其中的吸入口（2）和排出口（3）之间的多个不同类型的泵级。 该装置还具有气体通道（17），用于将分子量比通过吸入口（2）吸入的气体的分子量高的气体引入通过多于一个泵而与吸入口（2）间隔开的泵级中 阶段。 通过引入较高分子量的气体的泵级的压缩比增加以使得上游级的泵能够以所需的排出压力运行，由此可以在吸入口处建立高水平的真空（ 2）的真空泵装置。

    Turbo vacuum pump
    4.
    发明公开
    Turbo vacuum pump 失效
    Turbovakuumpumpe。

    公开(公告)号：EP0477924A1

    公开(公告)日：1992-04-01

    申请号：EP91116371.5

    申请日：1991-09-25

    申请人： HITACHI, LTD.

    发明人： Sakagami, Seiji ,  Ueda, Shinjiro ,  Mase, Masahiro ,  Nagaoka, Takashi

    IPC分类号： F04D19/04 ,  F04D29/04

    CPC分类号： F04D29/057 ,  F04D17/168 ,  F04D19/04 ,  F04D23/008 ,  F04D29/0513

    摘要： A compact, easy-to-handle turbo vacuum pump includes a housing (11) having an inlet port (11A) and an outlet port (11 B); a cylindrical rotor (30) disposed in the housing (11) and having a stepped peripheral surface and a plurality of blades (35) secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator (31) which faces the blades (35) of the rotor (30) across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator (31). The turbo vacuum pump further includes a rotating shaft (13) which is connected to the rotor (30) and is rotatably supported by radial gas bearing (33) and a thrust gas bearing (34); and a motor portion (16) for operating the rotor (30). Gas sucked in through the inlet port (11A) can be discharged into the atmosphere through the outlet port (11 B).

    摘要翻译： 紧凑，易于操作的涡轮真空泵包括具有入口（11A）和出口（11B）的壳体（11）; 设置在所述壳体（11）中并且具有阶梯状周面的圆柱形转子（30）和固定到所述台阶的突出角部的多个叶片（35） 以及泵送机构部分，其中泵送级由定子（31）形成，所述定子（31）跨越窄间隙面向转子（30）的叶片（35），并且其中在阶梯状凹陷中设置有外围泵流路 在定子（31）内。 所述涡轮真空泵还包括连接到转子（30）并由径向气体轴承（33）和推力气体轴承（34）可旋转地支撑的旋转轴（13）; 以及用于操作转子（30）的马达部分（16）。 通过入口（11A）吸入的气体可以通过出口（11B）排放到大气中。

    Vacuum pump
    5.
    发明公开
    Vacuum pump 失效
    Vakuumpumpe。

    公开(公告)号：EP0228040A1

    公开(公告)日：1987-07-08

    申请号：EP86117681.6

    申请日：1986-12-18

    申请人： HITACHI, LTD.

    发明人： Taniyama, Minoru ,  Mase, Masahiro ,  Nagaoka, Takashi

    IPC分类号： F04D29/10 ,  F16J15/40

    CPC分类号： F16J15/406 ,  F04D19/04 ,  F04D29/104

    摘要： This invention relates to a seal structure for a pump unit of a vacuum pump and a driving means for rotating a rotor in the pump stages (A, B) of the pump. The seal structure is provided with a narrow gap sealing means formed by a stationary member (2a) which is opposed to the portion of a shaft (4) of the driving means (5) which is between the pump unit and an upper bearing (6) supporting the same shaft (4), which narrow gap sealing means consists of first, second and third seal portions (15; 17); a means for supplying a discharge gas to the first seal portion; and a means for supplying a purge gas (11, 12, 13) to the second and third seal portions. Owing to these parts, the feed rate of the purge gas can be minimized, and the entry of the oil mist, which occurs during the lubrication of the bearing (6, 7), into the interior of the pump unit can be prevented. This enables the interior of the pump unit to be kept clean.

    摘要翻译： 本发明涉及一种用于真空泵的泵单元的密封结构和用于使泵的泵级（A，B）中的转子旋转的驱动装置。 密封结构设置有由固定构件（2a）形成的窄间隙密封装置，该静止构件与驱动装置（5）的轴（4）的位于泵单元和上轴承（6）之间的部分 ），所述窄间隙密封装置由第一，第二和第三密封部分（15; 17）组成; 用于向第一密封部分供应排出气体的装置; 以及用于将净化气体（11,12,13）供应到第二和第三密封部分的装置。 由于这些部件，可以使吹扫气体的进料速度最小化，并且可以防止在轴承（6,7）的润滑期间发生的油雾进入泵单元的内部。 这使得泵单元的内部保持清洁。

    Liquefied gas pump
    6.
    发明公开
    Liquefied gas pump 失效
    Kryogenische Pumpe。

    公开(公告)号：EP0127752A1

    公开(公告)日：1984-12-12

    申请号：EP84104076.9

    申请日：1984-04-11

    申请人： HITACHI, LTD.

    发明人： Kikkawa, Seiichi ,  Ogata, Hisanao ,  Hakuraku, Yoshinori ,  Mase, Masahiro ,  Tsumaki, Nobuo ,  Awada, Yoshihisa ,  Kajiwara, Hiroki

    IPC分类号： F04D7/02 ,  F04D29/58

    CPC分类号： F04D7/02 ,  F04D29/5893

    摘要： A room temperature region is established within a double insulated tank submerged in a cryogenic liquefied gas, a motor (5) and bearings (6, 7, 8) are disposed in the room temperature region, and a pump impeller (3) located in very lowtemperature region is driven through a driving shaft (4) by the motor (5).

    摘要翻译： 建立在浸没在低温液化气体中的双重绝缘罐内的室温区域，马达（5）和轴承（6,7,8）设置在室温区域内，泵叶轮（3）位于非常 低温区域由马达（5）驱动通过驱动轴（4）。

    Vacuum pump
    7.
    发明公开
    Vacuum pump 失效
    真空泵

    公开(公告)号：EP0451708A3

    公开(公告)日：1992-04-08

    申请号：EP91105353.6

    申请日：1991-04-04

    申请人： HITACHI, LTD.

    发明人： Taniyama, Minoru ,  Mase, Masahiro ,  Nakamori, Kazuaki ,  Nagaoka, Takashi

    IPC分类号： F04D19/04 ,  F04D29/58 ,  F04C29/04

    摘要： A vacuum pump of the present invention comprises a housing (103) including a suction port (101) and an exhaust port (102), a stator (105) fixed in the housing (103), a rotor (104) rotatably supported in the housing (103), and a cooling jacket (109) provided adjacent to the stator (105). Gas sucked from the suction port (101) and having a pressure substantially equal to or close to the atmospheric pressure is exhausted from the exhaust port (102). A cooling fluid having a thermal conductivity smaller than that of water, for example, of 0.08 to 0.25 Kcal/m·h·°C flows through the cooling jacket (109). When the gas contains aluminum chloride, the cooling fluid flows into the cooling jacket (109) in such a manner that the temperature inside a gas conduit is maintained to be higher than the sublimation temperature of aluminum chloride. Lubrication oil (110) may be supplied as the cooling fluid to the cooling jacket (109) from the same supply line as lubrication oil supplied to oil lubricating bearings (107a,107b) provided below a pump mechanism unit. A closed-loop line may be comprised of the cooling jacket (109), a tank, the supply line (111), and a return line, to thereby circulate the cooling fluid by means of a pump (113).

    摘要翻译： 本发明的真空泵包括：包括吸入口（101）和排气口（102）的壳体（103）;固定在壳体（103）中的定子（105）;转子（104） 壳体（103）以及与定子（105）相邻设置的冷却套（109）。 从吸气口101吸入的气体的压力大致等于或接近大气压，从排气口102排出。 导热系数小于水的导热系数例如为0.08至0.25Kcal / m·h·℃的冷却流体流过冷却套（109）。 当气体含有氯化铝时，冷却流体以这样的方式流入冷却套（109）中，使得气体导管内的温度保持高于氯化铝的升华温度。 润滑油（110）可以作为冷却流体从与供应到设置在泵机构单元下方的油润滑轴承（107a，107b）的润滑油相同的供应管线供应到冷却套（109）。 闭环线路可以包括冷却套（109），罐，供应管线（111）和回流管线，从而通过泵（113）循环冷却流体。

    Vacuum pump
    8.
    发明公开
    Vacuum pump 失效
    Vakuumpumpe。

    公开(公告)号：EP0451708A2

    公开(公告)日：1991-10-16

    申请号：EP91105353.6

    申请日：1991-04-04

    申请人： HITACHI, LTD.

    发明人： Taniyama, Minoru ,  Mase, Masahiro ,  Nakamori, Kazuaki ,  Nagaoka, Takashi

    IPC分类号： F04D19/04 ,  F04D29/58 ,  F04C29/04

    CPC分类号： F04D19/04 ,  F04C29/025 ,  F04C29/04 ,  F04D29/063 ,  F04D29/584 ,  F05D2260/607

    摘要： A vacuum pump of the present invention comprises a housing (103) including a suction port (101) and an exhaust port (102), a stator (105) fixed in the housing (103), a rotor (104) rotatably supported in the housing (103), and a cooling jacket (109) provided adjacent to the stator (105). Gas sucked from the suction port (101) and having a pressure substantially equal to or close to the atmospheric pressure is exhausted from the exhaust port (102). A cooling fluid having a thermal conductivity smaller than that of water, for example, of 0.08 to 0.25 Kcal/m·h·°C flows through the cooling jacket (109). When the gas contains aluminum chloride, the cooling fluid flows into the cooling jacket (109) in such a manner that the temperature inside a gas conduit is maintained to be higher than the sublimation temperature of aluminum chloride. Lubrication oil (110) may be supplied as the cooling fluid to the cooling jacket (109) from the same supply line as lubrication oil supplied to oil lubricating bearings (107a,107b) provided below a pump mechanism unit. A closed-loop line may be comprised of the cooling jacket (109), a tank, the supply line (111), and a return line, to thereby circulate the cooling fluid by means of a pump (113).

    摘要翻译： 本发明的真空泵包括一个包括吸入口（101）和排气口（102）的壳体（103），固定在壳体（103）中的定子（105），转子（104） 壳体（103）和与定子（105）相邻设置的冷却套（109）。 从吸入口（101）吸入的压力大致等于或接近大气压的气体从排气口（102）排出。 具有小于水的热导率的冷却流体，例如为0.08〜0.25Kcal / m·h。 DEG流过冷却套（109）。 当气体含有氯化铝时，冷却流体以使得气体导管内的温度保持高于氯化铝的升华温度的方式流入冷却套（109）。 可以将润滑油（110）作为冷却流体从与供给到设置在泵机构单元下方的油润滑轴承（107a，107b）的润滑油相同的供给管线供给到冷却套（109）。 闭路线可以由冷却套（109），罐，供应管线（111）和返回管线组成，从而借助于泵（113）循环冷却流体。