摘要:
A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8′, 9′) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40°C or lower is, advantageously, charged into the hermetically sealed chamber.
摘要:
A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8′, 9′) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40°C or lower is, advantageously, charged into the hermetically sealed chamber.
摘要:
A thermal air flow meter is equipped with a flow rate detector utilizing the phenomenon that heat is carried away in proportion to flow rate. The flow rate detector comprises a support (100), a heat-sensitive resistor (110) formed on the support and leads (102, 104) attached to both ends of the support (100). To make the temperature distribution uniform, the heat-sensitive resistor (110) is formed in such a manner that the resistance per unit length of the heat-sensitive resistor at either end of the support (100) is greater than the resistance per unit length of the heat-sensitive resistor at the center of the support (100). This arrangement can provide a thermal air flow meter which has a rapid response to changes in flow rate.
摘要:
The air flowing in through an air cleaner is passed through a main passage and sucked into an internal-combustion engine. A part of the air flowing through the main passage (16) flows in a by-pass passage (18). An air flow sensor (20) is provided in the by-pass passage. In this case, the length (1) of the bypass passage is substantially three or more times longer than that of a part (L) of the main passage corresponding thereto. Accordingly, even when the internal-combustion engine is operated with a throttle nearly totally open and the air in the main passage is pulsated, the average flow rate in the by-pass passage increases owing to the inertial lag effect obtained by lengthening the by-pass passage, so that it is possible to prevent the output of the flow sensor from undesirably lowering.
摘要:
Apparatus for sensing oxygen concentration using a solid electrolyte (1) of cylindrical shape, with a heater (4; 5) disposed within the solid electrolyte (1), is disclosed. The member (10) supporting the heater (5), and the leads (9, 9') for the heater (5), are integrally bonded to the heater through an inorganic bonding member (30) such as glass. By integraly bonding the support member (10) and leads (9, 9') through an inorganic bonding member (30), the heater length can be reduced.