Semiconductor acceleration sensor and vehicle control system using the same
    2.
    发明公开
    Semiconductor acceleration sensor and vehicle control system using the same 失效
    Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystemdafür。

    公开(公告)号:EP0459723A2

    公开(公告)日:1991-12-04

    申请号:EP91304732.0

    申请日:1991-05-24

    IPC分类号: G01P15/125 G01P1/00 G01P15/13

    摘要: A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8′, 9′) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40°C or lower is, advantageously, charged into the hermetically sealed chamber.

    摘要翻译: 半导体加速度传感器(1)由具有在一端具有预定质量的导电可移动电极(5)的悬臂(4)形成,至少一对固定导电电极(8,9)相对于 位于可动电极的相对侧的可动电极(5)以及设置在可动电极和固定电极之间的间隙。 为了防止可动电极与被接触的固定电极熔合,在本发明的第一方面中,在可动电极和固定电极之间设置绝缘层(6),该层位于可动电极上或固定电极上 在本发明的第二方面中,可动电极,优选地,固定电极由高熔点材料形成。 在这样的第二方面,为了提高高熔点材料与安装有固定电极(8分钟,9分钟)的基板(3a,3b)之间的粘附性,首先在所述基板上涂覆较低熔点的材料。 在本发明的特征中,描述了一种检测器单元处理电路(图20),其中电路的输出特性可以通过多个电阻器(Rs,Rf)的适当切换来数字地调节,并且在第二特征中, 传感器芯片和检测器单元集成电路位于公共基座(303)上并且安装在气密密封的室中,以防止影响传感器和检测器单元组件的操作的不利的环境影响。 将露点为-40℃以下的气体有利地装入密封室内。

    Semiconductor acceleration sensor and vehicle control system using the same
    3.
    发明公开
    Semiconductor acceleration sensor and vehicle control system using the same 失效
    半导体加速度传感器和使用其的车辆控制系统

    公开(公告)号:EP0459723A3

    公开(公告)日:1992-03-11

    申请号:EP91304732.0

    申请日:1991-05-24

    IPC分类号: G01P15/125 G01P1/00 G01P15/13

    摘要: A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8′, 9′) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40°C or lower is, advantageously, charged into the hermetically sealed chamber.

    Thermal air flow meter
    5.
    发明公开
    Thermal air flow meter 失效
    热式空气流量计。

    公开(公告)号:EP0118117A1

    公开(公告)日:1984-09-12

    申请号:EP84102228.8

    申请日:1984-03-02

    申请人: HITACHI, LTD.

    IPC分类号: G01F1/68 G01P5/12 F02D41/00

    CPC分类号: G01F1/698 G01F1/6842

    摘要: A thermal air flow meter is equipped with a flow rate detector utilizing the phenomenon that heat is carried away in proportion to flow rate. The flow rate detector comprises a support (100), a heat-sensitive resistor (110) formed on the support and leads (102, 104) attached to both ends of the support (100). To make the temperature distribution uniform, the heat-sensitive resistor (110) is formed in such a manner that the resistance per unit length of the heat-sensitive resistor at either end of the support (100) is greater than the resistance per unit length of the heat-sensitive resistor at the center of the support (100). This arrangement can provide a thermal air flow meter which has a rapid response to changes in flow rate.

    Air flow meter for internal-combustion engine
    6.
    发明公开
    Air flow meter for internal-combustion engine 失效
    Luftströmungsmesserfüreine Brennkraftmaschine。

    公开(公告)号:EP0087621A1

    公开(公告)日:1983-09-07

    申请号:EP83101186.1

    申请日:1983-02-08

    申请人: Hitachi, Ltd.

    IPC分类号: G01F5/00

    CPC分类号: G01F1/72 G01F1/68 G01F5/00

    摘要: The air flowing in through an air cleaner is passed through a main passage and sucked into an internal-combustion engine. A part of the air flowing through the main passage (16) flows in a by-pass passage (18). An air flow sensor (20) is provided in the by-pass passage. In this case, the length (1) of the bypass passage is substantially three or more times longer than that of a part (L) of the main passage corresponding thereto. Accordingly, even when the internal-combustion engine is operated with a throttle nearly totally open and the air in the main passage is pulsated, the average flow rate in the by-pass passage increases owing to the inertial lag effect obtained by lengthening the by-pass passage, so that it is possible to prevent the output of the flow sensor from undesirably lowering.

    摘要翻译: 通过空气滤清器流入的空气通过主通道并吸入内燃机。 流过主通道(16)的空气的一部分在旁通通道(18)中流动。 在旁路通道中设置有空气流量传感器(20)。 在这种情况下,旁通通道的长度(1)比对应于其的主通道的部分(L)的长度(1)大大多三倍或更多倍。 因此,即使当内燃机在节气门几乎完全打开并且主通道中的空气被脉动的情况下操作时,旁路通道中的平均流量由于通过延长旁通通道而获得的惯性滞后效应而增加, 从而可以防止流量传感器的输出不希望地下降。

    Apparatus for sensing oxygen concentration
    10.
    发明公开
    Apparatus for sensing oxygen concentration 失效
    氧浓度传感器。

    公开(公告)号:EP0177795A1

    公开(公告)日:1986-04-16

    申请号:EP85111569.1

    申请日:1985-09-13

    申请人: HITACHI, LTD.

    IPC分类号: G01N27/417

    CPC分类号: G01N27/4067

    摘要: Apparatus for sensing oxygen concentration using a solid electrolyte (1) of cylindrical shape, with a heater (4; 5) disposed within the solid electrolyte (1), is disclosed. The member (10) supporting the heater (5), and the leads (9, 9') for the heater (5), are integrally bonded to the heater through an inorganic bonding member (30) such as glass. By integraly bonding the support member (10) and leads (9, 9') through an inorganic bonding member (30), the heater length can be reduced.