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    Semiconductor acceleration sensor and vehicle control system using the same
    2.
    发明公开
    Semiconductor acceleration sensor and vehicle control system using the same 失效
    Halbleiterbeschleunigungsmesser und Kraftfahrzeugsteuerungssystemdafür。

    公开(公告)号：EP0459723A2

    公开(公告)日：1991-12-04

    申请号：EP91304732.0

    申请日：1991-05-24

    申请人： HITACHI, LTD. ,  HITACHI AUTOMOTIVE ENGINEERING CO., LTD.

    发明人： Tsuchitani, Shigeki ,  Suzuki, Seiko ,  Miki, Masayuki ,  Tanaka, Tomoyuki ,  Matsumoto, Masahiro ,  Ichikawa, Norio ,  Ebine, Hiromichi ,  Sugisawa, Yukiko ,  Sato, Kanemasa ,  Ueno, Sadayasu ,  Asano, Yasuhiro ,  Kubota, Masanori ,  Suzuki, Masayoshi

    IPC分类号： G01P15/125 ,  G01P1/00 ,  G01P15/13

    CPC分类号： G01P15/125 ,  G01P1/003 ,  G01P15/131 ,  G01P2015/0828

    摘要： A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8′, 9′) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40°C or lower is, advantageously, charged into the hermetically sealed chamber.

    摘要翻译： 半导体加速度传感器（1）由具有在一端具有预定质量的导电可移动电极（5）的悬臂（4）形成，至少一对固定导电电极（8,9）相对于 位于可动电极的相对侧的可动电极（5）以及设置在可动电极和固定电极之间的间隙。 为了防止可动电极与被接触的固定电极熔合，在本发明的第一方面中，在可动电极和固定电极之间设置绝缘层（6），该层位于可动电极上或固定电极上 在本发明的第二方面中，可动电极，优选地，固定电极由高熔点材料形成。 在这样的第二方面，为了提高高熔点材料与安装有固定电极（8分钟，9分钟）的基板（3a，3b）之间的粘附性，首先在所述基板上涂覆较低熔点的材料。 在本发明的特征中，描述了一种检测器单元处理电路（图20），其中电路的输出特性可以通过多个电阻器（Rs，Rf）的适当切换来数字地调节，并且在第二特征中， 传感器芯片和检测器单元集成电路位于公共基座（303）上并且安装在气密密封的室中，以防止影响传感器和检测器单元组件的操作的不利的环境影响。 将露点为-40℃以下的气体有利地装入密封室内。

    Semiconductor acceleration sensor and vehicle control system using the same
    3.
    发明公开
    Semiconductor acceleration sensor and vehicle control system using the same 失效
    半导体加速度传感器和使用其的车辆控制系统

    公开(公告)号：EP0459723A3

    公开(公告)日：1992-03-11

    申请号：EP91304732.0

    申请日：1991-05-24

    申请人： HITACHI, LTD. ,  HITACHI AUTOMOTIVE ENGINEERING CO., LTD.

    发明人： Tsuchitani, Shigeki ,  Suzuki, Seiko ,  Miki, Masayuki ,  Tanaka, Tomoyuki ,  Matsumoto, Masahiro ,  Ichikawa, Norio ,  Ebine, Hiromichi ,  Sugisawa, Yukiko ,  Sato, Kanemasa ,  Ueno, Sadayasu ,  Asano, Yasuhiro ,  Kubota, Masanori ,  Suzuki, Masayoshi

    IPC分类号： G01P15/125 ,  G01P1/00 ,  G01P15/13

    CPC分类号： G01P15/125 ,  G01P1/003 ,  G01P15/131 ,  G01P2015/0828

    摘要： A semiconductor acceleration sensor (1) is formed by a cantilever (4) having a conductive movable electrode (5) of predetermined mass at one end, at least one pair of fixed conductive electrodes (8, 9) which are stationary with respect to the movable electrode (5) located on opposing sides of the movable electrode, and gaps provided between the movable electrode and the fixed electrodes. To prevent the movable electrode becoming fused to the contacted fixed electrode, in a first aspect of this invention, an insulating layer (6) is provided between the movable electrode and fixed electrodes, the layer being either on the movable electrode or on the fixed electrodes and in a second aspect of this invention the movable electrode or, preferably, the fixed electrodes, are formed of a high melting point material. In such a second aspect, to improve adhesion between the high melting point material and a substrate (3a, 3b) to which the fixed electrodes (8′, 9′) are mounted, a lower melting point material is firstly coated on said substrates. In a feature of the invention, a detector unit processing circuit (Figure 20) is described in which the output characteristic of the circuit may be digitally adjusted by suitable switching of a plurality of resistors (Rs, Rf), and in a second feature, the sensor chip and the detector unit integrated circuit are located on a common base (303) and mounted in a hermetically sealed chamber to prevent adverse environmental effects affecting operation of the sensor and detector unit assembly. A gas having a dew point of -40°C or lower is, advantageously, charged into the hermetically sealed chamber.

    Thermal type flow sensor
    5.
    发明公开
    Thermal type flow sensor 审中-公开
    热式流量计

    公开(公告)号：EP1882911A3

    公开(公告)日：2010-04-28

    申请号：EP07014405.0

    申请日：2007-07-23

    申请人： Hitachi, Ltd.

    发明人： Nakano, Hiroshi ,  Yamada, Masamichi ,  Matsumoto, Masahiro ,  Watanabe, Izumi

    IPC分类号： G01F1/684

    CPC分类号： G01F1/6842 ,  G01F1/6845

    摘要： The present invention relates to a thermal type flow sensor (1A) comprising: a base portion (4) provided along the flowing direction of a fluid passing through a main passage (10); and a sensor element (2) mounted on the base portion (4) and equipped with an exothermic resistor (3) formed on a substrate for detecting the flow rate of fluid passing through main passage (10). This flow sensor (1A) is featured in that a rectangular recessed portion (5) is formed in the base portion (4), that the sensor element (2) is fixedly fitted in the recessed portion (5) in a manner that the surface of detecting portion of sensor element (2) is positioned lower than an upper edge of recessed portion (5), that a wall portion of measuring passage which is located to face the sensor element (2) is constricted, and that the exothermic resistor (3) is disposed along a passage of fluid and spaced away from the upstream side upper edge of recessed portion (5) and cannot be substantially affected by a disturbance of flow of fluid that may be caused to generate due to a step portion formed between the upper edge (5a) of recessed portion (5) and the surface of detecting portion of sensor element (2).

    Delta Sigma type A/D converter
    7.
    发明公开
    Delta Sigma type A/D converter 审中-公开
    Delta-Sigma A / D-Wandler

    公开(公告)号：EP1130784A9

    公开(公告)日：2004-07-14

    申请号：EP01103671.2

    申请日：2001-02-23

    申请人： Hitachi, Ltd. ,  Hitachi Car Engineering Co., Ltd.

    发明人： Matsumoto, Masahiro ,  Murabayashi, Fumio ,  Yamauchi, Tatsumi ,  Hanzawa, Keizi

    IPC分类号： H03M3/02

    CPC分类号： H03M3/484 ,  H03M3/474

    摘要： A Δ Σ type AD converter includes a local D/A converter having a SC integrator which is constructed by an analog switch operated at the first and second timings of an input (1), an analog switch operated at the first and second timings of an input (2), an analog switch operated at the first and second timings without selection of the input, a capacitor charged and discharged by these analog switches and an operational amplifier (21), a comparator (22), a D-type flip-flop (28), a switch (29) and reference voltage sources (30, 31).

    Collective wiring system and method of control thereof
    9.
    发明公开
    Collective wiring system and method of control thereof 失效
    Kollektives Verkabelungssystem und Steuerungsverfahren des Systems。

    公开(公告)号：EP0487503A1

    公开(公告)日：1992-05-27

    申请号：EP92101627.5

    申请日：1985-09-19

    申请人： HITACHI, LTD.

    发明人： Oho, Shigeru ,  Hirayama, Takeshi ,  Matsumoto, Masahiro ,  Hasegawa, Akira ,  Hamano, Fumio ,  Shibata, Takanori

    IPC分类号： H04Q9/00 ,  B60R16/02

    CPC分类号： H04Q9/00 ,  B60R16/0315

    摘要： A collective wiring system for an automobile provides a central control unit (CCU) which communicates with a plurality of terminal control units (LCU) each connected to one or more input or output devices (93, 94, 95, 96), such as switches, sensors, motors and the like. The control over output devices in response to the status of input devices is performed by the central control unit (CCU) on the basis of tables of data stored in memory (102, 103). A scan table (SCNTBL) controls the order in which data communications are made to the terminal control units (LCU) to obtain their status and provide them with control commands. A monitor table (STATTBL) stores the current status of the terminal control units (LCU) and a control table (CNTLTB) stores the control data for the terminal control units (LCU). A connection table (CCTBL) stores the relationship between the terminal control unit (LCU) for an input device and the terminal control unit (LCU) for the output device to be controlled thereby. Thus, connection control between input and output devices is effected by software.

    摘要翻译： 一种用于汽车的集体接线系统提供了一个与多个终端控制单元（LCU）通信的中央控制单元（CCU），每个终端控制单元连接到一个或多个输入或输出设备（93,94,95,96），例如开关 ，传感器，马达等。 响应于输入设备的状态的输出设备的控制由中央控制单元（CCU）根据存储在存储器（102,103）中的数据表执行。 扫描表（SCNTBL）控制向终端控制单元（LCU）进行数据通信的顺序，以获得其状态并向其提供控制命令。 监视表（STATTBL）存储终端控制单元（LCU）的当前状态，控制表（CNTLTB）存储终端控制单元（LCU）的控制数据。 连接表（CCTBL）存储用于输入装置的终端控制单元（LCU）与要控制的输出装置的终端控制单元（LCU）之间的关系。 因此，输入和输出设备之间的连接控制由软件实现。

    Capacitance type accelerometer and method of manufacturing the same
    10.
    发明公开
    Capacitance type accelerometer and method of manufacturing the same 失效
    Kapazitiver Beschleunigungsmesser und Verfahren zu seiner Herstellung。

    公开(公告)号：EP0369352A1

    公开(公告)日：1990-05-23

    申请号：EP89120880.3

    申请日：1989-11-10

    申请人： HITACHI, LTD.

    发明人： Suzuki, Seiko ,  Tsuchitani, Shigeki ,  Miki, Masayuki ,  Matsumoto, Masahiro

    IPC分类号： G01P15/125

    CPC分类号： B81C1/00301 ,  B81B2201/0235 ,  B81B2207/095 ,  B81B2207/096 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0828

    摘要： The invention relates to a capacitance type accelerometer and a method of manufacturing the same. The capacitance type accelerometer has a first silicon plate (2,7) formed as having a movable electrode part (7) which is moved according to acceleration, two second silicon plates (1, 3) which are disposed on both sides of the first silicon plate with a certain separation distance, and thermal oxide films (4, 5) which are respectively disposed between the first silicon plate except the movable electrode part (7) and the two second silicon plates (1, 3) and stick the first silicon plate (2) except the movable electrode and the two second silicon plates together. The process of manufacturing the capacitance type accelerometer is made by processing and cutting a wafer by dicing saw without coming into the accelerometer of cutting chips or cutting water.

    摘要翻译： 本发明涉及电容式加速度计及其制造方法。 电容型加速度计具有形成为具有根据加速度移动的可动电极部分（7）的第一硅板（2,7），设置在第一硅层两侧的两个第二硅板（1,3） 并且分别设置在除可移动电极部分（7）之外的第一硅板和两个第二硅板（1,3）之间的热氧化膜（4,5），并且将第一硅板 （2）除了可移动电极和两个第二硅板之外。 制造电容式加速度计的过程是通过切割锯切而不进入切屑或切割水的加速度计来切割晶片而制成的。