公开(公告)号：EP0278504B1

公开(公告)日：1994-06-15

申请号：EP88101999.6

申请日：1988-02-11

申请人： HITACHI, LTD. ,  NIPPON TELEGRAPH AND TELEPHONE CORPORATION ,  HITACHI ENGINEERING AND SERVICES CO., LTD.

发明人： Matsumoto, Manabu ,  Ikeguchi, Takashi ,  Ueda, Shinjiroo ,  Sonobe, Tadasi ,  Murashita, Toru ,  Ido, Satoshi ,  Kuroishi, Kazuo ,  Kazawa, Yoshiaki ,  Kakiuchi, Shunji ,  Kobari, Toshiaki

IPC分类号： H05H7/00 ,  H05H13/04

CPC分类号： H05H7/00

公开(公告)号：EP0278504A3

公开(公告)日：1990-01-24

申请号：EP88101999.6

申请日：1988-02-11

申请人： HITACHI, LTD. ,  NIPPON TELEGRAPH AND TELEPHONE CORPORATION ,  HITACHI ENGINEERING AND SERVICES CO., LTD.

发明人： Matsumoto, Manabu ,  Ikeguchi, Takashi ,  Ueda, Shinjiroo ,  Sonobe, Tadasi ,  Murashita, Toru ,  Ido, Satoshi ,  Kuroishi, Kazuo ,  Kazawa, Yoshiaki ,  Kakiuchi, Shunji ,  Kobari, Toshiaki

IPC分类号： H05H7/00 ,  H05H13/04

CPC分类号： H05H7/00

摘要： An industrial compact synchrotron radiation source with improved vacuum to prolong life-time of a charged particle beam. The synchrotron supplies highly stable, intense synchrotron radiation. In the source, a charged particle beam bending duct (1) forming a vacuum chamber through which the charged particle beam circulates, is encompassed by a bending electromagnet (2). At least one SR guide duct (3) for guiding the radia­tion to the outside extends from the outer circumferential wall (1e) of the bending duct. The SR guide duct is connected through a gate valve (5) to an SR beam line duct (7) for guiding the SR beam to an object to be worked on. A vacuum pump (4) is disposed on the side of the gate valve, close to an orbit (A) of the charged particle beam. The SR guide duct extending from the outer circumferential wall of the bending duct takes the form of a divergent duct which is widened in accordance with a spreading angle (ϑs) of the SR beam travelling through the SR guide duct.

公开(公告)号：EP0278504A2

公开(公告)日：1988-08-17

申请号：EP88101999.6

申请日：1988-02-11

申请人： HITACHI, LTD. ,  NIPPON TELEGRAPH AND TELEPHONE CORPORATION ,  HITACHI ENGINEERING AND SERVICES CO., LTD.

发明人： Matsumoto, Manabu ,  Ikeguchi, Takashi ,  Ueda, Shinjiroo ,  Sonobe, Tadasi ,  Murashita, Toru ,  Ido, Satoshi ,  Kuroishi, Kazuo ,  Kazawa, Yoshiaki ,  Kakiuchi, Shunji ,  Kobari, Toshiaki

IPC分类号： H05H7/00 ,  H05H13/04

CPC分类号： H05H7/00

摘要： An industrial compact synchrotron radiation source with improved vacuum to prolong life-time of a charged particle beam. The synchrotron supplies highly stable, intense synchrotron radiation. In the source, a charged particle beam bending duct (1) forming a vacuum chamber through which the charged particle beam circulates, is encompassed by a bending electromagnet (2). At least one SR guide duct (3) for guiding the radia­tion to the outside extends from the outer circumferential wall (1e) of the bending duct. The SR guide duct is connected through a gate valve (5) to an SR beam line duct (7) for guiding the SR beam to an object to be worked on. A vacuum pump (4) is disposed on the side of the gate valve, close to an orbit (A) of the charged particle beam. The SR guide duct extending from the outer circumferential wall of the bending duct takes the form of a divergent duct which is widened in accordance with a spreading angle (ϑs) of the SR beam travelling through the SR guide duct.

摘要翻译： 具有改善真空度的工业致密同步加速器辐射源，以延长带电粒子束的寿命。 同步加速器提供高度稳定，强烈的同步辐射。 在源中，形成带电粒子束循环的真空室的带电粒子束弯曲管道（1）由弯曲电磁体（2）包围。 用于将辐射引导到外部的至少一个SR引导管道（3）从弯曲管道的外周壁（1e）延伸。 SR引导管通过闸阀（5）连接到SR梁线管道（7），用于将SR梁引导到待加工物体。 真空泵（4）设置在闸阀侧面，靠近带电粒子束的轨道（A）。 从弯曲管道的外周壁延伸的SR导向管呈采取扩散管道的形式，该管道根据穿过SR导管的SR束的扩展角度（θs）加宽。