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公开(公告)号:EP0805132B1
公开(公告)日:2001-12-12
申请号:EP96303154.7
申请日:1996-05-03
发明人: Tsujimoto, Kenzo c/o Honshu Chem.Ind.Co., Ltd. , Ayabe, Yoshiharu c/o Honshu Chem.Ind.Co., Ltd. , Matsunaga, Fujihisa c/o Honshu Chem.Ind.Co., Ltd. , Nishiguchi, Ikuzo , Ishino, Yoshio 428, Yabunoshita-Cho, 2-Sujime
IPC分类号: C07B37/00 , C07C69/14 , C07C69/96 , C07C43/215 , C07C43/303 , C07D307/20 , C07D309/12 , C07F7/18
CPC分类号: C07F7/1892 , C07B37/00 , C07C41/30 , C07C41/48 , C07C67/293 , C07C69/96 , C07D309/12 , C07C69/017 , C07C69/157 , C07C43/215
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2.
公开(公告)号:EP0805132A1
公开(公告)日:1997-11-05
申请号:EP96303154.7
申请日:1996-05-03
发明人: Tsujimoto, Kenzo c/o Honshu Chem.Ind.Co., Ltd. , Ayabe, Yoshiharu c/o Honshu Chem.Ind.Co., Ltd. , Matsunaga, Fujihisa c/o Honshu Chem.Ind.Co., Ltd. , Nishiguchi, Ikuzo , Ishino, Yoshio 428, Yabunoshita-Cho, 2-Sujime
IPC分类号: C07B37/00 , C07C69/14 , C07C69/96 , C07C43/215 , C07C43/303 , C07D307/20 , C07D309/12 , C07F7/18
CPC分类号: C07F7/1892 , C07B37/00 , C07C41/30 , C07C41/48 , C07C67/293 , C07C69/96 , C07D309/12 , C07C69/017 , C07C69/157 , C07C43/215
摘要: A method of producing styrene derivatives expressed the general formula (2) by reacting a benzaldehyde derivative expressed by the general formula (1) with dibromomethane under the existence of zinc metal as well as an active chloride for producing various types of oxystyrene which are polymerized monomers as a photoresist material used in a high density integrated circuit process from easily available materials which also can easily be handled:
(wherein R indicates a an alkyl group, alkoxyalkyl group, an alkylcarbonyl group, an alkoxycarbonyl group, a 5 or 6-atom heterocylclic groups, or an alkylsilyl group);
(wherein R indicates any of the same substituents as those described above.)摘要翻译: 通过使由通式(1)表示的苯甲醛衍生物与二氯甲烷在锌金属存在下反应生成苯乙烯衍生物的方法,以及生成各种类型的聚合单体的氧化苯乙烯的活性氯化物 作为也可以容易地处理的容易获得的材料用于高密度集成电路工艺中的光致抗蚀剂材料:
(其中R表示烷基,烷氧基烷基,烷基羰基,烷氧基羰基,5或6 原子杂环基团或烷基甲硅烷基); (其中R表示与上述相同的取代基)。
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