公开(公告)号：EP4053516A1

公开(公告)日：2022-09-07

申请号：EP22159353.6

申请日：2022-03-01

申请人： HORIBA STEC, Co., Ltd.

发明人： TAGUCHI, Akihiro ,  TSUJI, Kensuke ,  MIZUYAMA, Yuki ,  NAKAMURA, Akihiro ,  MATSUDA, Shin

IPC分类号： G01F23/24 ,  G01F23/80

摘要： A rapid rise in the temperature of a liquid level sensor is prevented even in a case in which a vaporization of a liquid material advances so that the interior of a tank comes close to being a vacuum atmosphere. In a material supply system (100) that is equipped with a tank (211) containing a liquid material and with a liquid level sensor (213) that is provided inside the tank (211), and in which the liquid level sensor (213) is a self-heating type of sensor that, in a state in which the liquid level sensor (213) is generating heat as a result of being supplied with a predetermined normal energy, detects a liquid surface, there are provided a monitoring portion (44) that monitors a detection value obtained based on an output signal from the liquid level sensor (213), and an energy control portion (45) that, in a case in which the detection value monitored by the monitoring portion (44) reaches a predetermined upper limit value, performs control in such a way that the energy supplied to the liquid level sensor (213) is low-level energy that is lower than the normal energy.