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公开(公告)号:EP4457490A1
公开(公告)日:2024-11-06
申请号:EP22843328.0
申请日:2022-12-22
发明人: THIBAULT, Pierre
IPC分类号: G01F23/263 , G01F23/80 , G01N27/02 , G01N27/22
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公开(公告)号:EP4001859B1
公开(公告)日:2024-10-09
申请号:EP21209189.6
申请日:2021-11-19
IPC分类号: G01F23/263 , G01F23/284 , G01F23/2962 , G01F23/80 , G05B23/02 , G01F23/14 , G01F23/18
CPC分类号: G01F23/2962 , G01F23/265 , G01F23/284 , G05B23/0264 , G01F23/808 , G01F23/18 , G01F23/14 , G01F23/80
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公开(公告)号:EP3962836B1
公开(公告)日:2024-08-14
申请号:EP20798117.6
申请日:2020-04-14
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公开(公告)号:EP4092394B1
公开(公告)日:2024-06-26
申请号:EP21174606.0
申请日:2021-05-19
IPC分类号: G01F23/00 , G01F23/292 , G01F25/00 , G01N15/04 , G01N15/05 , G01N21/13 , G01N33/48 , G01F23/80 , G01F25/20
CPC分类号: G01F23/2921 , G01N15/042 , G01N2015/04720130101 , G01N15/05 , G01F23/804 , G01F25/24 , G01F25/20
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公开(公告)号:EP4356081A1
公开(公告)日:2024-04-24
申请号:EP22729663.9
申请日:2022-05-19
发明人: MALINOVSKIY, Alexey , REIMELT, Ralf
IPC分类号: G01F23/284 , G01F23/80 , G01S7/41 , G06N3/02
CPC分类号: G01F23/284 , G01F23/80 , G01S7/417 , G06N20/00 , G01S7/2923
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公开(公告)号:EP4076192B1
公开(公告)日:2024-01-31
申请号:EP20811135.1
申请日:2020-10-16
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公开(公告)号:EP3997425B1
公开(公告)日:2023-07-26
申请号:EP20733779.1
申请日:2020-06-18
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9.
公开(公告)号:EP3798584B1
公开(公告)日:2022-11-09
申请号:EP20198522.3
申请日:2020-09-25
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10.
公开(公告)号:EP4053516A1
公开(公告)日:2022-09-07
申请号:EP22159353.6
申请日:2022-03-01
摘要: A rapid rise in the temperature of a liquid level sensor is prevented even in a case in which a vaporization of a liquid material advances so that the interior of a tank comes close to being a vacuum atmosphere. In a material supply system (100) that is equipped with a tank (211) containing a liquid material and with a liquid level sensor (213) that is provided inside the tank (211), and in which the liquid level sensor (213) is a self-heating type of sensor that, in a state in which the liquid level sensor (213) is generating heat as a result of being supplied with a predetermined normal energy, detects a liquid surface, there are provided a monitoring portion (44) that monitors a detection value obtained based on an output signal from the liquid level sensor (213), and an energy control portion (45) that, in a case in which the detection value monitored by the monitoring portion (44) reaches a predetermined upper limit value, performs control in such a way that the energy supplied to the liquid level sensor (213) is low-level energy that is lower than the normal energy.
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