摘要:
An monolithic isolator is made by forming a capacitive insulating barrier using an interlayer insulation film on a semiconductor substrate to miniaturise a modem device using the monolithic isolator.
摘要:
In a silicon carbide static induction transistor, at a surface part of a semiconductor substrate, a p-type gate region (3) is formed partially overlapping a n-type source region (4), whereby the high accuracy in alignment between the gate region and the source region is not required, and the gate withstand voltage can be highly increased since the substrate is made of silicon carbide, which improves the yield of static induction transistors.
摘要:
In a silicon carbide static induction transistor, at a surface part of a semiconductor substrate, a p-type gate region (3) is formed partially overlapping a n-type source region (4), whereby the high accuracy in alignment between the gate region and the source region is not required, and the gate withstand voltage can be highly increased since the substrate is made of silicon carbide, which improves the yield of static induction transistors.