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公开(公告)号:EP0693768B1
公开(公告)日:2000-10-25
申请号:EP95111011.3
申请日:1995-07-13
申请人: Hitachi, Ltd.
发明人: Tutomu, Tojyou , Shoji, Shirai , Shinichi, Kato
CPC分类号: H01J29/628 , H01J29/488 , H01J29/503 , H01J2229/4841 , H01J2229/5635 , H01J2229/568
公开(公告)号:EP0693768B1
公开(公告)日:2000-10-25
申请号:EP95111011.3
申请日:1995-07-13
申请人: Hitachi, Ltd.
发明人: Tutomu, Tojyou , Shoji, Shirai , Shinichi, Kato
CPC分类号: H01J29/628 , H01J29/488 , H01J29/503 , H01J2229/4841 , H01J2229/5635 , H01J2229/568