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1.发明公开
公开(公告)号：EP2924405A1
公开(公告)日：2015-09-30
申请号：EP13856314.3
申请日：2013-10-25
CPC分类号： G01K7/25 , G01F1/68 , G01F1/6965 , G01F25/0007 , G01K13/02 , G01K15/005 , G01K2013/024 , G01K2205/02
摘要： An object of the present invention is to provide a compact and highly accurate intake air temperature sensor by integrating a fixed resistor, connected in series to a temperature sensing element, into an integrated circuit and dispensing with a reference resistor or a changeover switch for connecting the fixed resistor to this reference resistor. The intake air temperature sensor has a temperature sensing element 2 whose resistance value varies with the intake temperature; an integrated circuit 1 electrically connected to the temperature sensing element 2; a resistive element 3 connected in series to the temperature sensing element 2; a writable memory 7 that stores correction information corresponding to the resistance value of the resistive element 3; and a correction processing unit 6 that corrects errors based on the resistance value of the resistive element 3, which are included in output signals of the temperature sensing element 2, on the basis of the correction information stored in the writable memory 7.
摘要翻译： 本发明的目的是通过将串联连接到温度检测元件的固定电阻器集成到集成电路中并且分配参考电阻器或转换开关来提供紧凑且高精度的进气温度传感器，用于连接 固定电阻到该参考电阻。 进气温度传感器具有温度检测元件2，其电阻值随进气温度而变化; 电连接到温度检测元件2的集成电路1; 与温度检测元件2串联连接的电阻元件3; 存储对应于电阻元件3的电阻值的校正信息的可写存储器7; 以及校正处理单元6，其基于存储在可写存储器7中的校正信息，校正基于包含在温度检测元件2的输出信号中的电阻元件3的电阻值的误差。
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公开(公告)号：EP2789993A1
公开(公告)日：2014-10-15
申请号：EP12854859.1
申请日：2012-11-19
发明人： TOKUYASU Noboru , TASHIRO Shinobu , HANZAWA Keiji , MORINO Takeshi , DOI Ryosuke
IPC分类号： G01F1/684
CPC分类号： G01F1/692 , F01N11/002 , F01N2560/07 , F02D41/187 , G01F1/684 , G01F5/00 , G01F15/04
摘要： In order to provide a thermal-type flowmeter highly accurate, with high reliability, and simple in construction, while being available at a lower price, a thermal-type flowmeter as proposed includes a sub-path that takes in a fluid under measurement; a sensor element that measures a flow-rate of the fluid under measurement in the sub-path; a temperature detection element that detects a temperature of the fluid under measurement; a drive circuit that controls a heating temperature of the sensor element; and a protection circuit that protects the drive circuit from noise, a cavity being formed on a substrate of the sensor element, an exothermic resistor being provided on a thin-film part on the cavity through the intermediary of an electrically insulating film, and a flow rate being detected on the basis of temperature distribution in the thin-film part.
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公开(公告)号：EP2600121A1
公开(公告)日：2013-06-05
申请号：EP11812545.9
申请日：2011-07-28
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element 1 according to the present invention includes a semiconductor substrate 2, a cavity portion 4 formed on the semiconductor substrate 2, a heating resistor 5 formed on the cavity portion 4 via an electrically insulating film, a heating temperature sensor 7 for detecting heating temperature of the heating resistor 5, and a driving circuit 22 for controlling the heating temperature of the heating resistor 5 using the temperature detected by the heating temperature sensor 7. The heating temperature sensor 7 comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor 5 and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor 5.
摘要翻译： 本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。 根据本发明的传感器元件1包括半导体基板2，形成在半导体基板2上的空腔部分4，通过电绝缘膜形成在空腔部分4上的加热电阻器5，用于检测加热的加热温度传感器7 加热电阻器5的温度，以及驱动电路22，用于使用由加热温度传感器7检测的温度来控制加热电阻器5的加热温度。加热温度传感器7包括具有根据温度变化的电阻值的温度敏感电阻器 并且相对于加热电阻器5在被测量流体的流动方向的上游和下游，并且在垂直于待测量流体的流动方向的相对于加热电阻器5的方向的上侧和下侧。
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公开(公告)号：EP2615431A1
公开(公告)日：2013-07-17
申请号：EP11823396.4
申请日：2011-08-19
发明人： SUZUKI Kazunori , SATO Ryo , HANZAWA Keiji
IPC分类号： G01F1/696
摘要： Provided is a highly accurate, highly reliable gas flow rate measurement device that provides an enlarged temperature range over which the resolution at a high temperature and at a low temperature can be increased to achieve high accuracy no matter whether the characteristics of a gas temperature detection element are nonlinear. The gas flow rate measurement device includes a plurality of resistors that are disposed in a gas flow path, a gas flow rate detection circuit that outputs a gas flow rate detection signal in accordance with the flow rate of a gas flowing in the gas flow path by detecting a current flowing in the resistors or by detecting a voltage generated in accordance with the current, and a gas temperature detection element 1 that detects the temperature of the gas in the gas flow path. The gas flow rate detection circuit includes signal conversion means for converting a signal output from the gas temperature detection element to a signal that has a predetermined maximum output and a predetermined minimum output and is linear within a predetermined temperature range.
摘要翻译： 提供了一种高精度，高可靠性的气体流量测量装置，其提供了扩大的温度范围，无论气体温度检测元件的特性是否高，可以提高高温和低温下的分辨率以实现高精度 是非线性的。 气体流量测量装置包括设置在气体流路中的多个电阻器，气体流量检测电路，其根据气体流路中流动的气体的流量输出气体流量检测信号， 检测在电阻器中流动的电流或通过检测根据电流产生的电压，以及气体温度检测元件1，其检测气体流路中的气体的温度。 气体流量检测电路包括信号转换装置，用于将从气体温度检测元件输出的信号转换成具有预定最大输出和预定最小输出的信号，并且在预定温度范围内是线性的。
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公开(公告)号：EP2597433A1
公开(公告)日：2013-05-29
申请号：EP11809561.1
申请日：2011-07-06
IPC分类号： G01F1/692
CPC分类号： H01L37/00 , B81C1/00793 , G01F1/6845 , G01F1/692
摘要： An object of the present invention is to provide a thermal airflow sensor that prevents moisture absorption by a silicon oxide film formed closest to a surface (formed to be located on an uppermost portion), and that reduces a measuring error. In order to attain the foregoing object, the thermal airflow sensor according to the present invention applies an ion implantation to a silicon oxide film 4, formed closest to a surface (formed to be located on an uppermost portion), by using an atom or molecule selected from at least any one of silicon, oxygen, and an inert element such as argon or nitrogen, in order to increase a concentration of an atom contained in the silicon oxide film 4 more than that before the ion implantation.
摘要翻译： 本发明的目的是提供一种热气流传感器，其防止由最靠近表面（形成在最上部的部分）形成的氧化硅膜吸湿，并且减少了测量误差。 为了实现上述目的，根据本发明的热气流传感器通过使用原子或分子将离子注入施加到最靠近表面（形成在最上部的部分）形成的氧化硅膜4 选自硅，氧和惰性元素如氩或氮中的至少任一种，以便增加氧化硅膜4中包含的原子的浓度比离子注入之前的浓度更高。
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公开(公告)号：EP2554953A1
公开(公告)日：2013-02-06
申请号：EP11765823.7
申请日：2011-04-01
发明人： SATO Ryo , HANZAWA Keiji
CPC分类号： G01F1/692 , G01F1/696 , G01F25/0007
摘要： To reduce a signal variation of a bridge circuit connected with a temperature sensing resistor that is caused by a strain even when the strain is generated at a diaphragm portion of a substrate installed with a heater resistor and the temperature sensing resistor. In a thermal type flow rate resistor including a substrate, a diaphragm 13 formed at the substrate, and a heat generating resistor 2 and temperature detecting resistors 7 through 10 formed on the diaphragm for detecting a flow rate of a measured fluid by heating the heat generating resistor, strain detecting resistors 11 and 12 are formed on an upstream side and on a downstream side of a flow of the measured fluid relative to the heat generating resistor on the diaphragm, an amount of a strain generated on the diaphragm is detected by the strain detecting resistors, and a flow rate signal detected by the heat generating resistor and the temperature detecting resistors is compensated for the strain based on the detected amount of the strain.
摘要翻译： 即使当在安装有加热电阻器的基板的隔膜部分和温度感测电阻器上产生应变时，也可以减小由应变引起的与感温电阻器相连的桥接电路的信号变化。 在包括基板的热式流量电阻器，形成在基板上的隔膜13和形成在隔膜上的发热电阻器2和温度检测电阻器7至10，用于通过加热发热量来检测被测流体的流量 电阻器，应变检测电阻器11和12形成在测量流体相对于隔膜上的发热电阻器的流动的上游侧和下游侧，通过应变检测在隔膜上产生的应变量 检测电阻器和由发热电阻器和温度检测电阻器检测的流量信号基于检测到的应变量来补偿应变。
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公开(公告)号：EP2615431B1
公开(公告)日：2019-05-15
申请号：EP11823396.4
申请日：2011-08-19
发明人： SUZUKI Kazunori , SATO Ryo , HANZAWA Keiji
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公开(公告)号：EP2924405B1
公开(公告)日：2017-04-26
申请号：EP13856314.3
申请日：2013-10-25
CPC分类号： G01K7/25 , G01F1/68 , G01F1/6965 , G01F25/0007 , G01K13/02 , G01K15/005 , G01K2013/024 , G01K2205/02
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公开(公告)号：EP2916111A1
公开(公告)日：2015-09-09
申请号：EP13851331.2
申请日：2013-10-09
CPC分类号： G01F1/696 , G01F1/698 , G01F25/0007 , G01R31/025
摘要： In configurations in which a circuit element is connected in parallel with a resistor configuring a bridge circuit between two wires for taking out voltage from both ends of the resistor, it is difficult to detect a break in the two wires. A thermal flow meter includes a heating element 2 and a temperature controlling bridge circuit 3 that is formed of a plurality of resistors 4 to 8 and controls the temperature of the heating element 2. The thermal flow meter includes: a circuit element 15 connected in parallel with at least one resistor 7 configuring the temperature controlling bridge circuit 3 through two wires L2, L3 drawn from both ends of the resistor 7; a voltage detection circuit 17 that detects that the magnitude of voltage produced between the two wires L2, L3 has become smaller than a first predetermined value; and a fault signal output circuit 20 that, when it is detected at the voltage detection circuit 17 that the magnitude of the voltage has become smaller than the first predetermined value, outputs a signal indicating a fault.
摘要翻译： 在电路元件与构成两线之间的桥接电路的电阻并联连接以从电阻器的两端取出电压的结构中，难以检测到两根电线中断。 热流量计包括加热元件2和由多个电阻器4至8形成并控制加热元件2的温度的温度控制桥接电路3.热流量计包括：并联连接的电路元件15 至少一个电阻器7通过从电阻器7的两端拉出的两条线L2，L3构成温度控制桥接电路3; 电压检测电路17，其检测出两线L2，L3之间产生的电压的大小变得小于第一预定值; 以及故障信号输出电路20，当在电压检测电路17检测到电压的大小变得小于第一预定值时，输出指示故障的信号。
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10.发明公开CIRCUIT FOR DETECTING DISCONNECTION OF BRIDGE CIRCUIT AND SYSTEM HAVING MEANS FOR DETECTING DISCONNECTION 审中-公开电路识别的桥电路及其具有分离检测手段分离系统
公开(公告)号：EP2587270A1
公开(公告)日：2013-05-01
申请号：EP11798124.1
申请日：2011-06-21
CPC分类号： G01R31/02 , G01D3/08 , G01R31/026 , G01R31/2829
摘要： In an existing disconnection detection circuit for a bridge circuit, consideration is not taken into the fact that an offset voltage or temperature characteristic of a bridge output is degraded. Provided is a disconnection detection circuit for a bridge circuit capable of suppressing a change in a characteristic of a sensor to a minimal extent. A disconnection detection circuit 8a for a bridge circuit in accordance with the present invention comprises conducting means 9 and 10 each of which causes a current to flow from an output terminal of the bridge circuit to a predetermined potential, potential difference detecting means 12 and 13 each of which detects a potential difference between the potential at the output terminal of the bridge circuit and the predetermined potential, and a disconnection detecting means 14 that detects a disconnection on the basis of the outputs of the potential difference detecting means (see Fig. 1 ).
摘要翻译： 在用于桥接电路的现有断线检测电路，考虑不考虑偏移电压或一个桥输出的温度特性的factthat劣化。 本发明提供一种能够抑制到最小程度的传感器的特性变化的桥式电路的断路检测电路。 在雅舞蹈的桥电路与本发明的断路检测电路8a由导电装置9和10的每一个使电流从在所述桥电路的输出端子流动到预定电势，电势差检测单元12和13各 哪个的检测在桥电路的输出端子的电位与预定的电位，和一个断路检测单元14那样的电位差检测的电位差检测装置的输出的基础上的断开（参照图1） ，
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