摘要:
In configurations in which a circuit element is connected in parallel with a resistor configuring a bridge circuit between two wires for taking out voltage from both ends of the resistor, it is difficult to detect a break in the two wires. A thermal flow meter includes a heating element 2 and a temperature controlling bridge circuit 3 that is formed of a plurality of resistors 4 to 8 and controls the temperature of the heating element 2. The thermal flow meter includes: a circuit element 15 connected in parallel with at least one resistor 7 configuring the temperature controlling bridge circuit 3 through two wires L2, L3 drawn from both ends of the resistor 7; a voltage detection circuit 17 that detects that the magnitude of voltage produced between the two wires L2, L3 has become smaller than a first predetermined value; and a fault signal output circuit 20 that, when it is detected at the voltage detection circuit 17 that the magnitude of the voltage has become smaller than the first predetermined value, outputs a signal indicating a fault.
摘要:
In order to provide a thermal mass flowmeter which makes higher accuracy of gas flowrate measurement possible while reliability in the thermal mass flowmeter is ensured (while deterioration or breakage caused by droplet adhesion is prevented), the thermal mass flowmeter according to the present invention has a heating element for generating heat by conduction, a temperature detection bridge circuit for detecting a temperature of the heating element, and a sensor element driving circuit portion connected to the heating element and the temperature detection bridge circuit and executing conduction control to the heating element, in which the sensor element driving circuit portion has an output mechanism and an output impedance adjustment mechanism and the output impedance adjustment mechanism is disposed between the output mechanism and the heating element and its output impedance is higher than an electric resistance value of the heating element and less than 1 MΩ.
摘要:
In order to prevent deterioration and a breakdown of a sensor element when the sensor element is activated in a state where liquid is attached thereto, and to remove the liquid in a short period of time with lower power consumption, there is provided a gas sensor including a first heating element and a second heating element that is formed around the periphery of the first heating element and has a wider forming area than the first heating element, and measuring a gas amount by heating the first heating element to a predetermined temperature, in which the second heating element is heated when the gas sensor is activated, and the first heating element is heated to the predetermined temperature after a heat value of the first heating element is restricted for a predetermined period of time.
摘要:
An object of the present invention is to provide a compact and highly accurate intake air temperature sensor by integrating a fixed resistor, connected in series to a temperature sensing element, into an integrated circuit and dispensing with a reference resistor or a changeover switch for connecting the fixed resistor to this reference resistor. The intake air temperature sensor has a temperature sensing element 2 whose resistance value varies with the intake temperature; an integrated circuit 1 electrically connected to the temperature sensing element 2; a resistive element 3 connected in series to the temperature sensing element 2; a writable memory 7 that stores correction information corresponding to the resistance value of the resistive element 3; and a correction processing unit 6 that corrects errors based on the resistance value of the resistive element 3, which are included in output signals of the temperature sensing element 2, on the basis of the correction information stored in the writable memory 7.
摘要:
An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element 1 according to the present invention includes a semiconductor substrate 2, a cavity portion 4 formed on the semiconductor substrate 2, a heating resistor 5 formed on the cavity portion 4 via an electrically insulating film, a heating temperature sensor 7 for detecting heating temperature of the heating resistor 5, and a driving circuit 22 for controlling the heating temperature of the heating resistor 5 using the temperature detected by the heating temperature sensor 7. The heating temperature sensor 7 comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor 5 and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor 5.
摘要:
Provided is an airflow meter with good precision. In the airflow meter, which is provided with an arithmetic circuit that incorporates air temperature and a sensor module temperature as adjustment elements for the output characteristics of the airflow meter, corrects the output characteristics in accordance with the temperature difference between the air temperature and the sensor module temperature and reduces the correction amount when the absolute value of the difference between the air temperature and the sensor module temperature is small.
摘要:
Provided is a sensor device that suppresses a malfunction caused by a negative surge or a voltage drop. A sensor device includes a sensor element having an electrical characteristic varying according to a physical amount, a signal processing circuit configured to process an output signal of the sensor element, a transistor element interposed between a power source terminal and the signal processing circuit, a resistive element configured to connect a drain and a gate of the transistor element, or a collector and a base of the transistor element, and an element having threshold voltage for connecting the gate or the base of the transistor element to a GND. The element regulates current flowing from the resistive element in a direction of the GND, in a case in which supply voltage to the signal processing circuit falls below the threshold voltage.